脉冲偏压对电弧离子镀CrN_x薄膜组织结构与性能的影响

利用电弧离子镀技术在TC4基体上制备CrNx薄膜,研究了脉冲偏压对薄膜的组织结构和力学性能的影响。结果表明,在一定范围内提高脉冲偏压可以显著减少薄膜表面熔滴的数量及尺寸,改善表面平整度,获得高质量的薄膜;同时随着脉冲偏压的升高,CrNx薄膜由CrN单相变为Cr,Cr2N和CrN三相组成,硬度与结合强度的峰值可分别达到24294.2MPa和43N;薄膜的摩擦系数在偏压幅值为-300V时具有最小值0.43。     

镁合金微弧氧化膜的相结构研究

针对镁合金微弧氧化膜层,对其相组成和品粒尺寸随工艺参数的变化规律进行了定件和定量分析,并考察了相组成对膜层耐蚀性能的影响.结果表明:不同工艺参数条件下制备的微弧氧化膜层均由镁铝尖晶石和方镁石两相组成,但两相的含量差别很大.当这两相含量的比值在0.6～1.0范围内时,膜层的耐蚀性明显提高.不同时间内制备的膜层中MgAl2O3晶粒尺寸都在40～50nm的范围内,随着氧化时间的增加,晶粒尺寸呈现先减小后增大的趋势.     

铝含量对铜镍电阻薄膜结构及电性能的影响

采用磁控溅射法制备了铝含量分别为 0wt% ,10wt% ,2 0wt% ,30wt %的CuNi系电阻薄膜 ,应用透射电镜(TEM )、X光衍射仪 (XRD)分析薄膜在热处理前后的晶化行为 ,结合X光电子能谱仪 (XPS)分析了膜层表面结构组成。结果表明 ,当未加入铝元素时 ,溅射态CuNi薄膜析出孤岛状分布的CuNi晶化相 ;随着铝元素加入到一定量 ,CuNi薄膜将相继分解出链状分布的细小有序相 (Cu ,Ni) 9Al4 以及呈均匀连续状态的有序相 (Cu ,Ni)Al。经大气中退火处理 ,薄膜具有与溅射态相似的晶化相结构类型 ;未加入铝元素的退火态CuNi薄膜表面主要由疏松的氧化铜构成 ,而铝含量在 10wt%以上的CuNi薄膜表面主要由致密的三氧化二铝构成。随着薄膜中铝元素增多 ,CuNi薄膜电阻率呈下降趋势 ;铝含量为 10wt%～ 2 0wt %范围的CuNi薄膜具有最小的电阻温度系数值。随热处理温度提高 ,未含铝元素CuNi薄膜电阻率有增大倾向 ,电阻温度系数变化无一定规律 ;加至一定量铝元素的CuNi系薄膜电阻率随热处理温度的提高而减少 ,电阻温度系数朝正向移动     

TiAl合金高温循环氧化行为及其表面改性研究

研究了TiAl金属间化合物及表面涂层在空气中的高温循环氧化行为。结果表明:在800℃时TiAl合金具有较好的抗高温氧化行为,但当温度高于800℃时,TiAl合金表面未能形成单一的Al2O3保护层,而是形成外3层为疏松的TiO2层,内层为TiO2+Al2O3的混合氧化物层,因而使得TiAl合金的抗高温循环氧化性能严重蜕化。TiAl合金经过Cr改性铝化处理后,表面形成了具有立方Ll2结构的Al67Ti26Cr7层,立方Ll2结构的Al67Ti26Cr7不仅具有较高的铝含量,而且具有优良的韧性,因而使得处理后的TiAl合金具有良好的抗高温循环氧化性能。铝化物涂层尽管有很高的铝含量,但由于铝化得到的TiAl3相具有四方形结构,涂层非常脆,故该涂层抗高温循环氧化性能有待进一步提高。     

沉积参数对磁控溅射镀金膜膜层残余应力与微观形貌的影响

残余应力直接影响镀膜膜层的稳定性与可靠性。为减小薄膜的残余应力,提高镀膜膜层的可靠性,在不同溅射气压、不同镀膜温度条件下,在熔融石英基底上进行了直流磁控溅射镀金膜试验。通过基片曲率法得到薄膜的残余应力,采用激光平面干涉仪对基片的形变进行测试,对不同工艺参数下膜层的残余应力进行分析,并采用扫描电镜对膜层的表面形貌进行测试。通过试验可知,磁控溅射镀膜膜层的残余应力随镀膜温度的升高而升高,在一定工作气压范围内（0.2Pa~0.6Pa)随溅射气压的增加而降低。电镜测试结果表明,常温镀膜晶粒的尺寸约为30nm,180℃镀膜晶粒的尺寸增长至近100nm。镀膜温度越高,薄膜的微观结构越致密。     

7A55铝合金微弧氧化陶瓷膜的组织与性能

研究了7A55铝合金表面微弧氧化陶瓷膜的生长曲线、形貌、元素分布和相组成,测试了陶瓷膜与基体的附着力。结果表明,膜层厚度随着氧化时间的延长而增加,在不同的氧化阶段生长速率不同,膜层以向外生长为主;膜层为单层结构,Al,O元素含量基本保持不变,Mg元素参与了氧化反应;膜层主要由α-Al2O3和γ-Al2O3相组成,其中γ-Al2O3相含量较多;膜层与基体间的结合良好,划痕临界破坏载荷为897mN。     

沉积含Si过渡层对于不锈钢上沉积的DLC薄膜的性能影响

本文介绍了采用RF-PECVD法在3Cr13不锈钢基体圆片上沉积制备类金刚石多层膜,其内层薄膜为掺Si的过渡层,外层为不同厚度的在50～1000 nm之间的类金刚石薄膜（DLC）。实验结果表明沉积过渡层可以有效提高薄膜与基体的结合力。类金刚石薄膜的摩擦系数和薄膜在摩擦过程中的损坏情况都与外层薄膜的厚度有关。     

Al含量对一种新型高W，Mo的Ni3Al基合金组织和性能的影响

为满足1050℃使用的等温锻模具材料的需求,在IC6合金成分的基础上研制了一种新型的高W,Mo强化的Ni3Al基等轴晶合金,尝试在合金中添加了不同含量的铝改善合金的抗氧化性能,并研究了铝对合金微观组织和1050℃拉伸性能和1100℃持久性能的影响.采用带能谱的扫描电镜分析了合金微观组织以及氧化膜形貌,采用X射线衍射分析了合金氧化膜的相组成.研究结果显示,随铝含量从7wt%增加到8wt%,合金的氧化增重速率明显降低,氧化皮脱落量减少,合金的抗氧化性能明显提高.力学性能测试结果表明,铝含量为7.5wt%的合金具有较好的综合高温性能,当铝含量提高到8wt%时,合金中的初生γ＇相大量增加,合金高温强度明显降低.     

高速电弧喷涂FeCAl涂层组织结构及抗高温氧化性能研究

用高速电弧喷涂技术(HVAS)制备FeCrAl涂层,测试涂层在800℃的氧化性能,研究涂层在喷涂态和氧化后的组织结构.结果表明,由于冷却速率极快,FeCrAl涂层中形成比较多的Fe-Cr非晶态相,还有少量的Cr1.3Fe0.7O3和体心立方晶格的Fe-Cr固溶体,喷涂过程中Al的氧化比较严重.FeCrAl涂层的抗高温氧化性明显高于12Cr1MoV钢,接近于T91钢,涂层具有优异的抗氧化性一方面是由于层片间形成保护性的Cr氧化膜,阻止进一步氧化,也与含有较多抗氧化性好的非晶态相有关.高温氧化后,涂层中部分非晶态相晶化,转变为Fe-Cr晶体相.     

镁合金AZ91表面弧辉等离子沉积TiN/CrN薄膜的摩擦行为研究

镁合金具有高的比强度、低的弹性模量、减震等优点,在航空航天领域具有很大的应用前景.但是低劣的耐磨性导致镁合金限制于制造静载零件.为改进其耐磨性,采用弧辉等离子沉积的新工艺在镁合金AZ91表面涂覆TiN/CrN多层薄膜.薄膜由12层TiN和CrN交替沉积而成,总厚度为2 μm.用扫描电镜(SEM)、X射线衍射(XRD)和辉光放电光谱(GDS)分析涂层的成分和微观结构.采用球盘磨损试验测试摩擦系数,并计算出比磨损率.结果表明,与未处理试样相比摩擦系数增大,但磨损率急剧下降.薄膜的表面硬度超过HK0.011433.     

Tribological evaluation of surface modified H13 tool steel in warm forming of Ti–6Al–4V titanium alloy sheet

The H13 hot-working tool steel is widely used as die material in the warm forming of Ti–6Al–4V titanium alloy sheet. However, under the heating condition, severe friction and lubricating conditions between the H13 tools and Ti–6Al–4V titanium alloy sheet would cause difficulty in guaranteeing forming quality. Surface modification may be used to control the level of friction force, reduce the friction wear and extend the service life of dies. In this paper, four surface modification methods(chromium plating, TiAlN coating, surface polishing and nitriding treatment)were applied to the H13 surfaces. Taking the coefficient of friction(CoF) and the wear degree as evaluation indicators, the high-temperature tribological behavior of the surface modified H13 steel was experimentally investigated under different tribological conditions. The results of this study indicate that the tribological properties of the TiAlN coating under dry friction condition are better than the others for a wide range of temperature(from room temperature to 500 C), while there is little difference of tribological properties between different surface modifications under graphite lubricated condition, and the variation law of CoF with temperature under graphite lubricated is opposite to that under the dry friction.     

离子束辅助沉积WS_2-Ti-Ag复合薄膜的摩擦性能

采用ZDH-100型号离子束复合沉积设备沉积WS_2-Ti-Ag复合薄膜,基材为轴承钢和单晶硅(100).采用场发射扫描电子显微镜、XRD衍射仪,检测复合薄膜的表面形貌、微观结构.采用球-盘式摩擦磨损试验机,对复合薄膜在大气环境中的摩擦性能进行了研究.结果表明:采用离子束辅助沉积技术制备的WS_2-Ti-Ag复合薄膜是非晶态薄膜;并且随法向载荷的增加,复合薄膜的摩擦因数减小,摩擦状态越稳定,耐磨寿命越短.     

用离子束辅助沉积(IBAD)工艺制备TiCxNy膜的研究

用离子束辅助沉积（ＩＢＡＤ）工艺在９Ｃｒ１８、ＧＣｒ１５钢基体上形成了ＴｉＣｘＮｙ膜。ＴＥＭ观察发现膜均呈多晶结构,都具有（１１１）、（２００）和（２２０）择优取向。ＡＥＳ和ＸＰＳ分析进一步证实,ＴｉＣｘＮｙ膜呈含氧配置。干摩擦表明膜的抗氧化性能优良,其存在能有效抑制基体在摩擦过程中氧化膜的形成。又由于膜的硬度高,润滑性良好,每种基体的磨损特性都得到了显著地改善。但随着基体不同,膜的力学机械性能随     

Effects of Atomic Oxygen Irradiation on Transparent Conductive Oxide Thin Films

作为一种功能薄膜,透明导电氧化物(TCO)薄膜在飞行器的抗原子氧(AO)涂层和太阳能电池领域有着巨大的应用价值。ZnO:Al(ZAO)和In2O3:Sn(ITO)薄膜是目前研究和应用最广泛的TCO。本文对ITO薄膜和ZAO薄膜进行了不同通量的AO辐照。通过对辐照前后样品的X射线衍射、扫描电镜及霍耳效应的表征及测试,研究了AO辐照对这两种TCO薄膜的结构、性能及电学特性的影响。研究表明AO辐照对ZAO薄膜表面有明显的侵蚀作用,但对其结构和导电性能没有明显影响。对于ITO薄膜,随着AO通量的增大,其载流子浓度逐渐下降从而导致了电阻率的提高,电阻率的最大变化达到了21.7%。     

DLC 和CrN 薄膜在油润滑下的摩擦性能

采用闭合场非平衡直流磁控溅射技术和阴极电弧离子镀技术在轴承钢表面分别制备了DLC 和

CrN 薄膜,在全配方发动机油(CF-4,15W/40)润滑条件下,选择DLC/ 钢、CrN/ 钢摩擦配副,用SRV-IV 摩擦实

验机考察了25℃和100℃时DLC 与CrN 薄膜在不同载荷下的摩擦因数和磨损率,并对摩擦界面进行分析。结

果表明:DLC 和CrN 薄膜在油润滑条件下的摩擦因数都随着载荷的增加而降低;DLC 和CF-4 构成的固液复合

润滑体系具有更加优异的摩擦学性能;活性较高的CrN 薄膜与发动机油中的添加剂相互作用,在摩擦界面上

发生摩擦化学反应形成摩擦化学反应膜,并且薄膜表面形成的氧化层有利于提高薄膜在高温时的耐磨性。

     

Influences of pulse frequency on formation and properties of composite anodic oxide films on Ti-10V-2Fe-3Al alloy

A thick composite anodic oxide film was fabricated in an environmentally friendly malic acid electrolyte containing PolyTetraFluoroEthylene (PTFE) nanoparticles on Ti-10V-2Fe-3Al alloys. The influence of pulse frequency on the morphology, microstructure and composition of composite anodic oxide films containing PTFE nanoparticles was investigated using Field Emission Scanning Electron Microscopy (FE-SEM) equipped with Energy Dispersive Spectroscopy (EDS), Atomic Force Microscopy (AFM) and Raman spectroscopy. The tribological properties in terms of the friction coefficient, wear loss and morphology of worn surfaces were measured by ball-on-disc tests. The electrochemical property was evaluated by potentiodynamic polarization. The results indicated that the titanium dioxide of composite anodic oxide films transformed from anatase to rutile with the change of pulse frequency, which could result from the electrochemical dynamic equilibrium. The combination of PTFE nanoparticles and malic acid electrolyte molecules can influence the energy fluctuation of electrochemical equilibrium and formation of composite anodic oxide films. Moreover, composite anodic oxide films fabricated under the condition of 1.0–2.0 Hz exhibited the best wear resistance and corrosion property. The schematic diagram of the film formation and PTFE nanoparticles spreading process under different frequencies was elucidated.     

碳纤维增强树脂基摩擦材料摩擦磨损性能

为提高树脂基摩擦材料摩擦因数稳定性,改善其抗热衰退性能。以碳纤维作为增强纤维,采用热压成型工艺制备碳纤维增强树脂基摩擦材料;用XD-MSM型定速摩擦试验机测定摩擦磨损性能,研究了不同含量碳纤维增强对树脂基摩擦材料摩擦磨损性能的影响;利用VK-X200三维激光扫描显微镜观察了摩擦材料磨损后表面的微观形貌并探讨其磨损机理。结果表明,碳纤维增强树脂基摩擦材料的硬度、压缩强度和剪切强度均得到提高,并随碳纤维含量的增加而逐渐增大;碳纤维增强作用提高了树脂基摩擦材料的耐磨性和摩擦因数的稳定性,改变了树脂基摩擦材料的摩擦磨损形式;碳纤维含量为4wt%的增强树脂基摩擦材料摩擦因数稳定性较高,抗热衰退性能较好,磨损机制主要为疲劳磨损。     

用离子束辅助沉积(IBAD)工艺制备TiCxNy膜的研究

TiC_xN_y films were formed on 9Cr18 and GCr15 substrates using ion beam assisted deposition and studied with TEM, AES and XPS. TEM results showed that the films have polycrystalline structure with preferential growth orientations in (111),(200) and (220) directions. The AES and XPS results confirmed that the TiC_xN_y films contain oxygen coordination. The dry friction test indicated that oxidation resistance of the films is excellent, formation of the oxide film in the friction process can be effectively inhibited because of its presence on the steel substrates. At the same time,the wear properties of substrates were obviously improved because of high hardness and excellent lubriction of the films. However, the mechanical properties of TiC_xN_y films deposited by different N fluence appear different variance rule with the diffrent substrates. Microhardness and friction properties of TiC_xN_y films are relative to its N content and a excessively high N content has a harmful influence on the hardness and friction properties.     

Microstructure and Optical Characterization of Magnetron Sputtered NbN Thin Films

Some fundamental studies on the preparation, structure and optical properties of NbN films were carried out. NbN thin films were deposited by DC reactive magnetron sputtering at different N2 partial pressures and different substrate temperatures ranging from –50 ℃ to 600 ℃. X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM) were employed to characterize their phase com- ponents, microstructures, grain sizes and surface morphology. Optical properties inclusive of refractive indexes, extinction coefficients and transmittance of the NbN films under different sputtering conditions were measured. With the increase in the N2 partial pressure, δ-NbN phase structure gets forming and the grain size and lattice constant of the cubic NbN increasing. The deposited NbN film has relatively high values of refractive index and extinction coefficient in the wavelength ranging from 240 nm to 830 nm. Substrate tem- perature exerts notable influences on the microstructure and optical transmittance of the NbN films. The grain sizes of the δ-NbN film remarkably increase with the rise of the substrate temperature, while the transmittance of the films with the same thickness decreases. Ultra-fine granular film with particle size of several nanometers forms when the substrate is cooled to –50 ℃, and a remarkable aug- mentation of transmittance could be noticed under so low a temperature.     

4116航天润滑油摩擦特性的影响因素

采用球盘试验机测定了4116航天润滑油在不同工况下的摩擦因数,尤其成功实现了高低温环境下的测试.应用正交试验设计方法,研究了滚动速度、滑动速度、最大工作压力和入口油温4个因素对润滑油摩擦特性的影响,并绘出各因素对摩擦因数的影响曲线.研究结果表明:滑动速度和滚动速度对摩擦因数有显著影响,入口油温和最大工作压力对摩擦因数影响不显著.摩擦因数随着滑动速度的增加而增加,但是增加的幅度随滑动速度的增加而逐渐减小;随着滚动速度的增加,摩擦因数迅速减小,当滚速高于20m/s时趋于稳定;入口油温低于0℃时,其对摩擦因数有较大影响;随最大工作压力的增加摩擦因数缓慢增加.