用离子束辅助沉积(IBAD)工艺制备TiCxNy膜的研究

用离子束辅助沉积（ＩＢＡＤ）工艺在９Ｃｒ１８、ＧＣｒ１５钢基体上形成了ＴｉＣｘＮｙ膜。ＴＥＭ观察发现膜均呈多晶结构，都具有（１１１）、（２００）和（２２０）择优取向。ＡＥＳ和ＸＰＳ分析进一步证实，ＴｉＣｘＮｙ膜呈含氧配置。干摩擦表明膜的抗氧化性能优良，其存在能有效抑制基体在摩擦过程中氧化膜的形成。又由于膜的硬度高，润滑性良好，每种基体的磨损特性都得到了显著地改善。但随着基体不同，膜的力学机械性能随

Study of TiCxNy Films Prepared by Ion Beam Assisted Deposition(IBAD)

TiC x N y films were formed on 9Cr18 and GCr15 substrates using ion beam assisted deposition and studied with TEM, AES and XPS. TEM results showed that the films have polycrystalline structure with preferential growth orientations in (111),(200) and (220) directions. The AES and XPS results confirmed that the TiC x N y films contain oxygen coordination. The dry friction test indicated that oxidation resistance of the films is excellent, formation of the oxide film in the friction process can be effectively inhibited because of its presence on the steel substrates. At the same time,the wear properties of substrates were obviously improved because of high hardness and excellent lubriction of the films. However, the mechanical properties of TiC x N y films deposited by different N fluence appear different variance rule with the diffrent substrates. Microhardness and friction properties of TiC x N y films are relative to its N content and a excessively high N content has a harmful influence on the hardness and friction properties.