Current Capabilities of MEMS Capacitive Accelerometers in a Harsh Environment

One of the general trends of the MEMS sensors business is the utilization of the technology to satisfy harsh environment requirements (temperature, shock, vibration, environment security). The conjunction of material (standard silicon, SiC or SOI), with complex micromachining techniques and advanced assembly techniques are the key to provide robust sensors with a minimum concession on specification. The goal of this paper is to present progress on gun hard (>20,000 g) and wide temperature range MEMS accelerometers (-120degC to +180degC). Concrete solutions and results (out of more than 500 tested products) will be presented and discussed in detail     

MEMS技术在智能航空发动机中的应用研究现状及前景

利用MEMS(micro-electro-mechanical system)体积小、质量轻、集成度高等特点,将该技术用于航空发动机,可以更好地实现对发动机的流动、燃烧过程进行主动控制、对关键结构部件的损伤以及滑油系统健康状态进行监测等方面的功能,进而实现航空发动机的智能化.为了实现MEMS在航空发动机上的应用,一方面是提高MEMS自身适应航空发动机环境的能力;另外一方面则需要开展其和航空发动机的兼容性设计及研究.随着MEMS技术的不断发展,它必将是推动航空发动机发展的一个重要新技术.      

MEMs for Aerospace Navigation

The MEMS aerospace market has its own specificities in terms of market size, standards, and performance characteristics (very long term stability, reliability, and safety levels). Improvements are needed for future applications. THALES Avionics has a twenty-year experience in quartz and silicon MEMS design and manufacturing and is recognized as a leader by the French MOD in this field. MEMS pressure sensors and accelerometers are manufactured in large volume and used for safety-critical applications. THALES technology policy focused on planar architecture, die vacuum packaging, and deep reactive ion etching (DRIE) allowing good characteristics for sensors in development. A Silicon Vibrating Beam Accelerometer single chip is now under development. Its operating principle is described with two resonators in push-pull configuration. A tuning fork planar rate gyro is also developed with exactly the same technology for industrial efficiency. Performance results will be addressed. The development and industrialization road-map of theses inertial products is described for the following five years. Gyro-compassing grade inertial sensors would be available during the next decade allowing low-cost, high-grade navigators using simultaneously GNSS receivers and inertial MEMS navigators.     

多个MEMS惯性姿态模块同时标定方法研究

针对MEMS 惯性姿态模块的应用需求, 根据已有的MEMS 三轴加速度计和 三轴陀螺仪的零偏、标度因子和非正交等误差及其随温度的变化模型, 设计了多个 MEMS 惯性姿态模块误差同时标定的方法,该方法可实现多个模块传感器数据的同步采 集,在常温下可对多个MEMS 惯性姿态模块的非正交误差进行批量标定,在全温度范围 内同时标定多个模块的温度漂移误差。试验表明,该方法校正了MEMS 惯性传感器的非 正交误差和温度漂移误差,提高了MEMS 惯性传感器的精度,同时提高了标定的效率, 减少了标定成本,有利于工程实现。     

姿态测量中MEMS陀螺输出信号处理方法研究

为实现基于MEMS器件的舰船测姿,对MEMS陀螺的输出信号进行研究与处理。在分析MEME陀螺的输出误差模型基础上,通过经典卡尔曼滤波与鲁棒滤波的理论对比,设计滤波器对其输出信号进行滤波降噪。实验表明：鲁棒卡尔曼滤波方法对于MEMS陀螺输出信号的平滑降噪效果显著。     

基于零速修正的行人导航关键技术及研究进展

在室内等卫星导航受限场景下，可采用MEMS惯性传感器对行人进行自主导航定位。采用MEMS惯性传感器的行人自主导航技术主要包括基于步长估计的行人航位推算和基于零速修正的行人导航算法两种方式。首先介绍了两种方式的基本原理，然后重点分析了零速修正的行人导航算法，阐述了相关的关键技术和研究进展。最后，对行人自主导航未来的发展趋势进行了展望，并指出了需要重点关注的技术难点。     

Using natural features for vision based navigation of an indoor-VTOL MAV

The use of natural features for vision based navigation of an indoor Vertical-Take-Off-and-Landing (VTOL) Micro Aerial Vehicle (MAV) named Air-Quad is presented. Air-Quad is a small four-rotor helicopter developed at the ITE.Such a helicopter needs reliable attitude information. The measurements of the used MEMS gyroscopes and accelerometers are corrupted by strong noise. To be useful, the MEMS sensors have to be part of an integrated navigation system with aiding through complementary sensors like GPS or the computer vision module presented here.In the computer vision module, feature points are detected and tracked through the image sequence. The relative rotation and translation of the camera are estimated using the two-dimensional motion of the feature points.The three-dimensional points in the scene are modeled with the image coordinates of their first sighting and their inverse depths. Only these inverse depths are estimated for the feature points. An efficient sparse bundle adjustment algorithm is used to improve the estimation of the scene structure and the navigation solution.It is shown that the use of the computer vision module greatly improves the navigation solution compared to a solution based only on MEMS sensors.     

Effect of temperature on corrosion behavior of 3003 aluminum alloy in ethylene glycol–water solution

The effect of temperature on the corrosion behavior of 3003 aluminum alloy in ethylene glycol–water solution was investigated by potentiodynamic polarization and electrochemical impedance spectroscopy(EIS) techniques. The surface characterization was observed and determined by scanning electron microscopy(SEM), atomic force microscopy(AFM) and energy dispersive spectrometer(EDS). The results demonstrate that the anodic aluminum dissolution and the cathodic oxygen reduction were accelerated by the increased temperature. However, as temperature was over60 °C, the solubility and concentration of oxygen decreased, resulting in the inhibition of cathodic reaction. The cathodic reaction rate of 3003 aluminum alloy rose to the maximum at 60 °C. The Warburg impedance in Nyquist diagram diminished and then was replaced by a negative capacitance caused by the absorption of intermediate corrosion product on electrode. On the other hand,after potentiodynamic measurements, 3003 aluminum alloy suffered pitting corrosion. The dissolution of aluminum alloy around secondary phase particles expanded both horizontally and vertically.     

MEMS传感器在航空综合电子备份仪表中的应用

概述微机电传感器的技术现状和在IESI中的应用.通过国外典型IESI产品,着重分析了IESI的组成原理、性能特点和微机电传感器的作用.研究表明:包括高精度微机电惯性敏感器、微硅压力计在内的微型传感器开发是IESI的技术关键,国产化IESI设备在军/民用飞机中有广泛的应用前景.     

多传感器微惯性测量单元标定技术研究

基于设计生产的一款每个敏感轴集合两种类型MEMS陀螺仪和加速度计的微惯性测量单元(MIMU),提出了一种MIMU精确标定测试方法。该方法以MIMU整体为标定对象,考虑了温度对零偏、标度因数的影响、传感器轴间不完全正交误差及结构安装误差等因素,对MIMU中各惯性传感器的初始零偏、标度因数、交叉耦合系数等参数进行了标定。产品标定测试结果证实了该方法的有效性。     

飞机环控系统管道气流温度的测量

根据实际使用中出现的问题，对各种实用的管道气流温度传感器的误差进行了计算，对电阻式和热电偶式温度传感器的误差原因作了定量分析。由于带密封罩的温度传感器在实际使用中存在着明显的缺点，建议今后使用热电偶测量飞机环控系统管道气流温度，并提出了一种实用热电偶温度传感器的结构形式，同时也介绍了如何减小由于热传导和热辐射引起的误差。     

Automotive-grade MEMS sensors used for general aviation

The attitude heading reference system (AHRS) provides data for primary flight instruments, head-up displays, autopilots, and moving map navigation systems. Advances in solid-state MEMS rate sensors, coupled with Kalman filter algorithms designed to mitigate high drift rates, provide the basis for low-cost, high-performance AHRS for general aviation. This paper describes the performance of a low cost, miniaturized AHRS using automotive-grade MEMS sensors. The performance of the system is detailed. The implications for certification of this class of system and fault tolerance are discussed.     

MEMS加速度计的封装建模与粘胶优化

随着MEMS加速度计应用领域的逐渐扩大，其工作环境的温度区间跨度也在不断增大，如何降低由封装过程引入的温度漂移量是MEMS加速度计设计的关键。对一种玻璃-硅-玻璃梳齿加速度计的完整封装结构进行了建模，并且对5种粘胶方式进行了热应力形变仿真，对仿真中温度性能最好的远三点粘胶和最差的全面粘胶这两种方式进行了装表与温度系数测试。实测结果表明，远三点粘胶的加速度计温度性能相比全面粘胶提升了2.5倍，与仿真结果相符。     

2022年国外惯性技术发展与回顾

惯性技术广泛应用于海、陆、空、天各种载体的导航、定位与控制。通过对2022年的IEEE惯性传感器与系统会议、DGON惯性传感器系统会议、MEMS国际会议和圣彼得堡组合导航会议等惯性技术相关会议文献以及惯性技术领域相关机构披露的动态信息进行的详细梳理,总结了光学陀螺、微机电(MEMS)陀螺、半球谐振陀螺(HRG)、加速度计以及新兴的量子惯性传感器等惯性仪表及惯性导航系统(INS)的发展现状,并对惯性技术领域的发展趋势进行了分析与展望。当前,惯性技术领域相关研究主要侧重于小型化、提高精度和降低成本等方面。其中,光学陀螺较为成熟,更为侧重于小型化相关研究;微机电陀螺正在致力于向导航级性能突破和发展;半球谐振陀螺主要着力于探索降低高端产品的制造成本。     

一种MEMS陀螺标度因数误差补偿方法

高动态、恶劣温度环境下,微小型飞行器(MAV)导航、制导与控制系统关键器件微机电系统(MEMS)陀螺受温度和转速耦合影响,其标度因数误差呈强非线性特点,常规方法无法精确补偿。通过分析MEMS陀螺标度因数误差的产生机理,建立了包含温度和转速非线性因素的标度因数误差模型,提出一种基于径向基(RBF)神经网络的标度因数非线性耦合误差补偿方法,解决了常规补偿方法精度差的问题。标定与补偿实验表明:在-10～+55℃温度范围、-150～+150(°)/s输入转速范围内,采用新方法补偿后MEMS陀螺输出平均精度比多项式拟合方法提高7倍;在-20～+20(°)/s低输入转速的误差强非线性区间内,精度提高近20倍,验证了本文方法的有效性和优越性。     

战术导弹用MEMS陀螺仪研制进展及关键技术

MEMS陀螺仪具有体积小、质量轻、启动快、可靠性高、价格低、易于大批量生产、能承受恶劣环境条件等突出优势,可广泛应用于防空导弹、反坦克导弹、便携式导弹、航空制导炸弹等制导武器.介绍了MEMS陀螺仪的基本原理、发展现状,分析了战术导弹对MEMS陀螺仪的应用需求,指出了MEMS陀螺仪在战术导弹型号应用中需解决微机械加工工艺、全温性能指标、复合力学环境等关键技术问题,对MEMS陀螺仪在战术导弹中的应用具有指导意义.     

MEMS惯性器件低应力封装过渡层研究

封装应力是影响MEMS惯性器件输出性能的主要因素之一，封装应力是由于封装过程中封装对象间材料热特性不匹配所引起的。封装应力除了受封装对象本身的材料性能影响外，还与芯片及基底间的过渡层形式有关。不同的过渡层形式不仅会影响封装应力的峰值，还会对应力的分布情况产生影响。为了研究不同形式的过渡层对三层结构MEMS惯性器件芯片封装应力的影响，首先利用COMSOL有限元仿真分析软件简要地分析了不同材料参数对封装应力的影响，并进一步研究了常见封装形式以及不同封装结构的应力分布规律。结果表明，不同的粘接材料、封装形式和封装结构都会引起封装应力的变化。     

MEMS陀螺阵列技术研究进展

MEMS陀螺仪体积小、功耗低的优点扩展了惯性器件的应用领域,对于制导武器的小型化具有重要的意义.但国内MEMS陀螺仪精度相对偏低、噪声大,这限制了它在高精度军事领域的应用.陀螺阵列可以利用冗余信息有效提高MEMS陀螺的精度,实现低精度陀螺的高精度应用,而不需要技术和工艺的突破.介绍了MEMS陀螺阵列的基本原理,总结了陀螺阵列近年来的研究进展.在此基础上,提出了陀螺阵列的4大关键技术:陀螺冗余系统配置,误差分析、建模与标定,故障诊断以及信息融合.最后,分析了陀螺阵列的发展特点以及研究重点,给出了MEMS陀螺阵列技术未来的发展思路.     

Electrical Characteristics of Silicon Solar Cells at Low Temperatures

Experimentally determined values of open-circuit voltage, short-circuit current, and maximum power for p on n and n on p silicon solar cells are presented for temperatures ranging from -196°C to + 50°C under equivalent space sunlight intensities of 58 mW/cm2 and 268 mW/cm2. An anomalous behavior is observed in the n on p cells at low temperatures; namely, the open-circuit voltage becomes nearly independent of temperature below a transition temperature Tt that depends on the sunlight intensity.     

硅微谐振式加速度计技术现状及展望

硅微谐振式微加速度计是各种MEMS加速度计中被普遍看好并期待为将来的高精度微加速度计发展的一个重要方向,正在全世界范围内被广泛研究。本文对硅微谐振式微加速度计的发展现状进行了评述。根据国内外不同的技术实现,诸如工作原理、微加工工艺实现、应用范围等对其进行了分类阐述。最后,对硅微谐振式加速度计研究中一些关键技术进行了讨论,并提出了展望。