共查询到19条相似文献,搜索用时 109 毫秒
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当前,硅微机械器件引起导航与控制系统传感器开发者们越来越密切的关注,微硅加速度计和角速率传感器最根本的优势在于其体积小,功耗低,相对成本较低,而且与微电睡的组合成本低,可实现。本文介绍了RDC在微硅加速度计和多用传感器研制方面的成果,介绍了硅平衡式加速度计和频率输出型开环加速度计的基本特性,同时,探讨了今后导航和控制系统中硅微机械应用的技术路线。 相似文献
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微压压力传感器的结构改进 总被引:3,自引:0,他引:3
硅压力传感器具有小型和高灵敏等的优点,近年来小型高灵敏度的压力传感器的量程已低到1kPa。在这一发展过程中硅弹性体结构的改进起了很大的作用,本文介绍了作者首先提出了适用于微压压力传感器的梁膜(岛)结构以及以后几年来出现的相近的结构,用这些结构都已制成量程为1kPa的压力传感器 。 相似文献
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针对一种以方形硅膜片为一次敏感元件、硅梁谐振子为二次敏感元件 ;采用电阻热激励、压敏电阻拾振的压力微传感器 ,分析了其工作机理 ;依幅值、相位条件讨论了该谐振式微传感器的闭环自激系统 ;建立了微传感器的温度场模型和热应力模型 ,并进行了仿真计算与分析 相似文献
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迄今为止,惯性传感器的应用被局限在不计较设备造价的航空、航天和军事等领域,而微机械技术的出现使一般用户使用低成本、高精度的惯性传感器成为可能。 相似文献
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设计和制造微机电系统(MEMS)是全球日益关注的新技术。这一新兴的工程领域的技术目的是实现有微机电相关集成的微机械系统。在众多的新颖应用中,惯性敏感器件成为一个倍受关注的领域和研发热点。大多数的工作集中于振动惯性敏感器件,其中,传感器的动态运动依惯性测量参数的不同而变化。 相似文献
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陶健美 《自动驾驶仪与红外技术》2002,(1):20-24
本文描述了一种新型谐振式加速度计,该加速度计中的横梁和振动摆耦合为一体,且横梁受内置式压敏电阻激励后,传感摆的振动变化,加速度使振动摆偏移原始位置。造成传感器内部件特征应力变化,使谐振频率发生改变,本文着重研究谐振梁振动特征,在高振幅非线性区域,理论与实际地处理显示结果,该加速度计电-热干扰可以相互消除谐振传感原理保证了该传感器的准数字信号输出,高灵敏度以及完整的力学试验,先进的自动安全系统和电子伺服系统要求传感器结构可靠。传感器自测试性能,在运行中内部元件无需结构调整。自测试理论也可用于非谐振式结构的传感器。 相似文献
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分体式石英谐振加速度传感器在性能提升上受到装配误差等因素的影响较大,故提出一种全石英谐振加速度计芯片结构,包括下层的硅结构和上层的石英结构。下层的硅基底仅作为支撑结构进行加工制作,敏感单元为全石英材料,硅结构与石英结构键合到一起,结构加工完成后去除硅材料,以释放石英敏感单元。整体结构为中心对称,包括质量块、音叉结构、微杠杆结构和应力分配梁,芯片通过微杠杆结构来增大传感器的灵敏度,并通过应力分配梁使石英音叉两根振梁上的内应力均匀一致。通过仿真验证了设计的有效性,仿真的差动灵敏度为35Hz/g。 相似文献
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For a given output voltage and power, the peak resonant capacitor voltage and peak inductor and switch currents of the series resonant converter depend strongly on the choice of transformer turns ratio and of tank inductance and capacitance. In this paper the particular component values which result in the smallest component stresses are determined, and a simple design strategy is developed. The procedure is illustrated for an off-line 200 W, 5 V application, and it is shown that an incorrect choice of component values can result in significantly higher component stresses than are necessary. 相似文献
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Hamill D.C. Lee C.Q. Liu R. 《IEEE transactions on aerospace and electronic systems》1991,27(3):564-566
In a recent paper by C.Q. Lee et al. (ibid., vol.25, no.6, p. 844-7, Nov. 1989), the authors analyzed a DC-DC converter that they termed the LLC-type PRC (parallel resonant converter). Its resonant network contains three active components-two inductances and a parallel capacitance-and as a consequence the converter might be expected to have third-order dynamics. But Lee et al. employed a matrix transformation to show that the behavior of the circuit may be represented as a state-plane trajectory, as for a second-order circuit. The purpose of this contribution is to show that the converter has a zero-frequency eigenvalue, associated with undesirable circulating DC. The second-order dynamics exhibited by the third-order converter are explained by an application of Thevenin's theorem. Some aerospace applications of the LLC-type parallel resonant converter (PRC) are discussed. In their reply, the authors show that the circulating direct current does not exist in the practical converter circuit 相似文献
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Eugene Churazov Irina Zhuravleva Sergey Sazonov Rashid Sunyaev 《Space Science Reviews》2010,157(1-4):193-209
While very often a hot intergalactic medium (IGM) is optically thin to continuum radiation, the optical depth in resonant lines can be of order unity or larger. Resonant scattering in the brightest X-ray emission lines can cause distortions in the surface brightness distribution, spurious variations in the abundance of heavy elements, changes in line spectral shapes and even polarization of line emission. The magnitude of these effects not only depends on the density, temperature and ionization state of the gas, but is also sensitive to the characteristics of the gas velocity field. This opens a possibility to use resonant scattering as a convenient and powerful tool to study IGM properties. We discuss the application of these effects to galaxy clusters. 相似文献
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The various types of converter are described, and the history of resonant power supplies is briefly sketched. The differences between pulse-width-modulated (PWM) switch mode power supplies and resonant power supplies are discussed. Single-switch, multiple-switch, and series and parallel resonant converters are examined. The control of resonant converters is addressed. Hardware is briefly considered 相似文献
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The linear theory of MHD resonant waves in inhomogeneous plasmas is reviewed. The review starts from discussing the properties of driven resonant MHD waves. The dissipative solutions in Alfvén and slow dissipative layers are presented. The important concept of connection formulae is introduced. Next, we proceed on to non-stationary resonant MHD waves. The relation between quasi-modes of ideal MHD and eigenmodes of dissipative MHD are discussed. The solution describing the wave motion in non-stationary dissipative layers is given. It is shown that the connection formulae remain valid for non-stationary resonant MHD waves. The initial-value problem for resonant MHD waves is considered. The application of theory of resonant MHD waves to solar physics is discussed. 相似文献