| 硅微谐振加速度计的研究现状及发展趋势 |
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| 引用本文： | 杨博,阚宝玺,徐宇新,胡启方.硅微谐振加速度计的研究现状及发展趋势[J].导航与控制,2017,16(4):96-106. |
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| 作者姓名： | 杨博 阚宝玺 徐宇新 胡启方 |
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| 作者单位： | 北京航天控制仪器研究所,北京,100039 |
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| 基金项目： | 装备预先研究项目，装备预研共用技术项目，北京市自然科学基金 |
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| 摘 要： | 硅微谐振加速度计具有体积小、 功耗低、 准数字量输出和精度提升大的优点,是一种具有良好应用前景的高精度MEMS惯性仪表.总结分析了近些年国内外在硅微谐振加速度计方面的研究现状,主要在结构设计及工艺、 测控电路设计等方面阐述了各自特点.最后,结合近些年MEMS惯性仪表的发展趋势,对硅微谐振加速度计晶圆级真空封装、 测控电路数字化、仪表补偿智能化3个发展方向进行了展望.
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| 关 键 词： | 硅微谐振加速度计 晶圆级封装 测控电路 温度补偿 |
Research Status and Development Trend of
Silicon Resonant Accelerometer |
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| YANG Bo,KAN Bao-xi,XU Yu-xin and HU Qi-fang.Research Status and Development Trend of
Silicon Resonant Accelerometer[J].Navigation and Control,2017,16(4):96-106. |
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| Authors: | YANG Bo KAN Bao-xi XU Yu-xin and HU Qi-fang |
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| Institution: | Beijing Institute of Aerospace Control Devices,Beijing 100039,Beijing Institute of Aerospace Control Devices,Beijing 100039,Beijing Institute of Aerospace Control Devices,Beijing 100039 and Beijing Institute of Aerospace Control Devices,Beijing 100039 |
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| Abstract: | The Silicon resonant accelerometer is a kind of high precision MEMS inertia device with good application prospect, due to the advantages of its small size, low cost, quasi-digital output, and high-precision potential. This paper summarizes the research status of Silicon resonant accelerometer, and describes their characteristics mainly in aspect of struc-ture and fabrication process, interface circuit, et al. Finally, based on the development trends of MEMS, this paper prospects the two development directions of Silicon resonant accelerometer—wafer level package and digitization of interface circuit. |
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| Keywords: | Silicon resonant accelerometer wafer level packaging(WLP) interface circuit temperature compensation |
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