旋转条件下切割SiC 单晶片实验研究

通过旋转条件下切割SiC单晶片,分析了切片表面微观形貌特点,研究了线锯速度、工件进给速度和工件转速对切片表面粗糙度与切向锯切力的影响规律。结果表明:增加工件旋转,切片表面平整光滑,沿线锯运动方向没有明显沟槽及凸起,质量明显得到改善;当转速由0增加到12 r/min时,切片表面粗糙度由1.532μm降到0.513μm;线锯速度和工件旋转速度增大、工件进给速度减小,切向锯切力减小,表面粗糙度减小。当线锯速度和工件旋转速度过大,切向锯切力和表面粗糙度反而会有所增加。     

工艺参数对SiC单晶片切割表面质量的影响

SiC单晶片表面质量对其后续半导体器件的制造有很大影响,但其材料的高硬度和高脆性,使切片过程变得非常困难。本文在往复式电镀金刚石线切割装置上采用单因素和正交法进行了SiC单晶切割实验,研究了工件转速、线锯速率、工件进给速率、线锯磨损对晶片表面粗糙度的影响规律以及三维形貌特点。结果表明:附加工件旋转运动,晶片表面质量提高,划痕减少、深度变浅;线速增大、工件旋转速率增大或工件进给速率减小,表面粗糙度值减小;线锯磨损晶片表面粗糙度值增大。相对线速和线锯磨损,工件转速和工件进给速率对晶片表面质量及粗糙度的影响更大。应在综合考虑效率和线锯损耗的基础上合理确定切割参数,尤其是工件进给速率。     

复合纳米自润滑金刚石砂轮磨削SiC陶瓷的试验研究

提出一种复合纳米自润滑金刚石砂轮的制备方法,并对制备的砂轮进行SiC陶瓷的磨削试验,分析砂轮表面不同质量分数的复合纳米颗粒对磨削性能的影响。使用MoS₂、TiO₂纳米颗粒作为自润滑砂轮基底的填充材料,采用复合纳米自润滑金刚石砂轮和传统金刚石砂轮进行磨削对比试验,研究复合纳米自润滑金刚石砂轮的润滑机制。研究结果表明,复合纳米自润滑金刚石砂轮自释放的纳米颗粒有效地参与了磨削区间的润滑,砂轮的法相力、切向力降低,提升了工件表面质量。在磨削深度为2～8μm内,复合纳米自润滑金刚石砂轮的具体表现为法向磨削力降低18.6%～38.7%、切向磨削力降低11.2%～28.6%,工件表面粗糙度降低13.9%～41.5%。根据本试验所得数据,当砂轮表面复合纳米颗粒质量分数为8%时,润滑性能和工件表面质量最佳。     

SiC工件ELID磨削性能

通过ELID(在线修整砂轮)磨削方法对SiC进行磨削试验,从材料去除机理、砂轮粒度的选择、切削深度等方面探讨了SiC ELID磨削参数的选择.实验表明:砂轮粒度、切削深度对加工质量影响较大,在磨削效率和加工工件的表面质量等因素的综合分析基础上,找到优化的工艺参数,使效率和精度达到最高.在本试验条件下,用粒度为W3.5的金刚石砂轮磨削20 min,表面粗糙度可达到0.023μm.     

基于运动学的高速高精密铣削力建模：综合模型与试验

高速高精密铣削加工中铣削力是最重要的过程参量之一,铣削力信息的准确反馈对保证加工过程中的稳定性具有十分重要的意义。然而,影响铣削力大小的因素有很多种,目前缺乏一种考虑多种因素下的综合铣削力模型。因此,着重研究并综合考虑了刀具磨损、刀具跳动、刀具弹性变形对瞬时切削厚度的影响,同时分析了弹性变形对刀具切入与切出角的影响规律,改进了刀具瞬时切削厚度模型。基于运动学分析,将切削刃位置与预加工工件形态相互统一,建立了综合铣削力模型。为验证所提出综合模型的精确性和通用性,进行铣削实验,实验结果表明,铣削力预测值与实验值吻合较好,铣削力误差值小于1%,并通过分析刀具磨损与铣削力之间的相互变化关系,得出进给方向上的铣削力与Z向的铣削力系数对刀具磨损的影响最大。因此,切向力分量以及Z向的铣削力系数的变化特征可以较好的表征刀具磨损状况,从而提高铣削加工精度和效率。     

氮化硅陶瓷切削仿真与实验

针对金刚石砂轮磨粒尺寸、形状的不规则性和空间位置不确定性的特点,采用球坐标中随机点产生的空间平面切分实体和截角多面体相结合的方法,并考虑氮化硅陶瓷工件的磨削亚表面形貌和裂纹损伤,建立了截角多面体磨粒和含有典型裂纹的工件模型。进行单颗磨粒切削氮化硅陶瓷的有限元仿真和实验,结果表明:磨削加工和数值仿真的磨削力值变化趋势相同,差值小于8%,切削力随砂轮转速增大而减小、随工件速度和切削深度增大而增大,而切削深度对切削力的影响程度最大。     

SiC单晶片CMP超精密加工技术现状与趋势

综述了半导体材料SiC抛光技术的发展,介绍了SiC单晶片CMP技术的研究现状,分析了CMP的原理和工艺参数对抛光的影响,指出了SiC单晶片CMP急待解决的技术和理论问题,并对其发展方向进行了展望。     

机器人旋转超声铣削铝合金铣削力实验研究

基于KUKA工业机器人开展旋转超声铣削2A12铝合金实验,研究两种铣削方式切削点运动轨迹,为进一步研究铣削力奠定了基础.并分析旋转超声铣削(RUM)实验和普通铣削(CM)主轴转速、进给速度、径向切宽、轴向切深和超声电流对铣削力的影响规律.结果表明旋转超声铣削与普通铣削相比铣削力明显降低.     

时变因素作用下薄壁筒工件车削振动特性与实验

针对薄壁筒类工件的切削颤振问题,采用理论建模、数值仿真和实验测试相结合的方法,研究切削过程中时变工件厚度和切削位置对薄壁筒振动特性的影响规律.利用有限元法建立主轴-卡盘-工件工艺系统模型,分析不同壁厚、切削力位置对薄壁筒切削系统的固有模态、频率响应函数的影响.结合模态实验与切削振动实验表明:薄壁筒周向壳体模态对于壁厚的...     

7050航空铝合金“单因素”本构模型参数与温度相关性研究

从理论和实验两方面研究7050航空铝合金"单因素"本构模型中参数与温度的相关性.通过位错理论分析和进行材料基本关系式推导指出铝合金材料模型受温度的影响.设计准静态压缩实验和高速冲击压缩实验研究材料的静、动态力学性能.通过对试验数据的分析、拟合和比较,得出7050航空铝合金"单因素"本构模型中的参数与温度相关的结论.根据试验结果建立材料参数与温度之间的数学映射,并在此基础上构建7050航空铝合金单因素"本构模型,最后进行切削实验验证模型的正确性.7050航空铝合金"单因素"本构模型的建立为进一步开展切削加工有限元模拟和进行工艺优化奠定基础.     

Cutting path-dependent machinability of SiCp/Al composite under multi-step ultra-precision diamond cutting

Particle-tool interactions, which govern the synergetic deformation of SiC particle reinforced Al matrix composites under mechanical machining, strongly depend on the geometry of particle position residing on cutting path. In the present work, we investigate the influence of cutting path on the machinability of a SiCp/Al composite in multi-step ultra-precision diamond cutting by combining finite element simulations with experimental observations and characterization. Be consistent with experimentally characterized microstructures, the simulated SiCp/Al composite is considered to be composed of randomly distributed polygonally-shaped SiC particles with a volume fraction of 25vol%. A multi-step cutting strategy with depths of cut ranging from 2 to 10 μm is adopted to achieve an ultimate depth of cut of 10 μm. Intrinsic material parameters and extrinsic cutting conditions utilized in finite element simulations of SiCp/Al cutting are consistent with those used in corresponding experiments. Simulation results reveal different particle-tool interactions and failure modes of SiC particles, as well as their correlations with machining force evolution, residual stress distribution and machined surface topography. A detailed comparison between numerical simulation results and experimental data of multi-step diamond cutting of SiCp/Al composite reveals a substantial impact of the number of cutting steps on particle-tool interactions and machined surface quality. These findings provide guidelines for achieving high surface finish of SiCp/Al composites by ultra-precision diamond cutting.     

电火花线切割加工中放电间隙电压变化特性

电火花线切割加工时工具(电极丝)和工件之间的放电电压是对放电加工过程进行实时检测的重要参数.本文在理论分析的基础上,采用正交试验设计,应用极差分析法和方差分析法定量研究了高速走丝电火花线切割加工中放电间隙电压量的变化特性与加工中峰值电流、工件厚度及切割方向之间的关系.研究的结果为准确检测高速走丝电火花线切割加工状态提供了依据.     

Simulation of temperature distribution and discharge crater of SiCp/Al composites in a single-pulsed arc discharge

SiC_p/Al composites are difficult-to-cut materials. In recent years, electrical arc discharge machining has been developed to improve the machinability of these materials. However, there is a big challenge to build a satisfactory heat transfer model of SiC_p/Al composites in the arc machining. This is not only because of the material property difference between the reinforcement and matrix material but also because of the micro-dimension SiC reinforcements. This paper established a new heat conduction simulation model considering the SiC particle-Al matrix interface and the phase change effects in a single-pulsed arc discharge of SiC_p/Al composites. A novel SiC particle-Al matrix cell geometric model was designed firstly. Then, the temperature distribution at a different depth from the workpiece surface was analyzed, the influence of sic volume fraction on temperature field was studied, and the contribution of the interface thermal resistance and latent heat were explained. To demonstrate the validity of the new numerical model, comparisons and verifications were employed. Finally, the method of improving the model was proposed and the machining mechanism of arc discharge of SiC_p/Al matrix materials was discussed. It was found that high temperature is prone to concentrate on the surface layers of the workpiece especially when the SiC fraction is high, also, the temperature fluctuates respectively at the evaporation point of aluminum and SiC, and the SiC-Al resistance has less influence on temperature distribution compared to latent heat, etc. The model build in this work improves the simulation accuracy observably compared to the previous model, and the simulation work will help to acquire a detailed mechanism of material removal of SiC_p/Al composites in the arc discharge machining.     

旋转状态下方形通道内部流场特性热线实验

为了解决旋转条件下热线技术应用问题并且在此基础上精确测量旋转方形通道内部流场特性,搭建了用于旋转通道流场测试实验平台,采用了两种连线方式对热线进行了标定实验,获得了热线测量旋转通道内部平均速度的相对误差为±6%,对雷诺数和旋转数范围分别是5000~10000和0~0.222的旋转通道流场进行了测量,结果表明:旋转导致速度型整体向后缘面（Y/D=-0.5）偏转,X/D和旋转数越大,速度型偏转越明显;旋转数为0.222时,后缘面附近边界层速度型出现了一个拐点,可能与由哥氏力不稳定性引起的二次流有关.      

Analysis of grinding mechanics and improved grinding force model based on randomized grain geometric characteristics

Too high grinding force will lead to a large increase in specific grinding energy, resulting in high temperature in grinding zone, especially for the aerospace difficult cutting metal materials,seriously affecting the surface quality and accuracy. At present, the theoretical models of grinding force are mostly based on the assumption of uniform or simplified morphological characteristics of grains, which is inconsistent with the actual grains. Especially for non-engineering grinding wheel,most g...     

应力场下锯切加工技术的研究

本文主要研究了应力场下锯切切削力的特点。试验证明在拉应力场下锯切工件比普通锯切工件的锯切力小，使切削更加有利、高效。     

基于三维实体建模的刷式密封传热机理数值研究

建立了基于三维实体建模的刷式密封传热特性求解模型,在验证数值模型准确性的基础上,分析了刷式密封流场与温度场分布特性,研究了压比、转速、干涉量和热流密度对刷丝最高温度的影响,揭示了刷式密封的传热机理。结果表明:高温区主要集中在末排刷丝与转子面接触位置,刷丝的最高温度随着压比、转速、干涉量和热流密度增加而增大,其中干涉量对刷丝最高温度的影响最为明显。当干涉量从0.1 mm增至0.7 mm时,刷丝的最高温度上升1.61倍;刷式密封热量的主要来源为刷丝与转子表面摩擦产生的热量,其传热形式包括导热和对流换热,摩擦热量通过导热形式进入刷丝和转子,当刷丝与转子之间的接触力增加时,摩擦热量增大,刷丝的最高温度升高,摩擦热量通过对流换热形式在流体和固体之间进行传递,热量散失主要形式为泄漏气流带走部分热量。