| MOEMS惯性器件技术研究进展 |
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| 引用本文： | 夏君磊,王巍,徐宇新.MOEMS惯性器件技术研究进展[J].导航与控制,2009(4):40-45. |
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| 作者姓名： | 夏君磊 王巍 徐宇新 |
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| 作者单位： | 北京航天时代光电科技有限公司;北京航天时代光电科技有限公司;北京航天时代光电科技有限公司 |
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| 摘 要： | 介绍了MOEMS惯性器件的概念和特点，总结了国内外MOEMS惯性器件包括MOEMS陀螺和MOEMS加速度计的研究方案和研究进展，指出未来MOEMS惯性器件可能的发展方向和发展前景。
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| 关 键 词： | 微光机电系统 陀螺 加速度计 |
Development of MOEMS Inertial Devices |
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| XIA Jun-lei,WANG Wei and XU Yu-xin.Development of MOEMS Inertial Devices[J].Navigation and Control,2009(4):40-45. |
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| Authors: | XIA Jun-lei WANG Wei and XU Yu-xin |
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| Institution: | Beijing Aerospace Times Optical-electronic Technology Co. Ltd;Beijing Aerospace Times Optical-electronic Technology Co. Ltd;Beijing Aerospace Times Optical-electronic Technology Co. Ltd |
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| Abstract: | The concept and characters of MOEMS inertial device is introduced firstly, then the development of the various typical configurations of MOEMS inertial device, including gyroscope and accelerometer, is reviewed. Finally, the perspective and development direction of the MOEMS inertial device is estimated. |
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| Keywords: | MOEMS gyroscope accelerometer |
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