IC制造中平坦化技术的性能与分析

表面平整化技术是半导体工业的关键技术,在一定程度上制约着半导体芯片集成技术的发展,针对多层立体布线的IC全局平坦化技术,介绍了代表当今平整化技术及其未来的发展方向,其中一些技术会取代传统的CMP技术而成为IC产业的主导技术之一;叙述了超大规模集成电路(ULSI)的发展对全局平整化的具体要求;对传统的CMP技术的特点进行了分析;并论述了当今主流的IC平整化技术的原理、性能以及未来的发展方向。     

IC6合金动态拉伸过程原位观测

为了研究IC6合金的断裂机制,用背散射电子图像原位观察该合金的动态拉伸过程.结果表明IC6合金中的M6C碳化物是脆性相,在受力时容易开裂.在裂纹已经产生的情况下,大量M6C碳化物会加速裂纹的扩展.     

Missions to Mercury

Mercury is a very difficult planet to observe from the Earth, and space missions that target Mercury are essential for a comprehensive understanding of the planet. At the same time, it is also difficult to orbit because it is deep inside the Sun’s gravitational well. Only one mission has visited Mercury; that was Mariner 10 in the 1970s. This paper provides a brief history of Mariner 10 and the numerous imaginative but unsuccessful mission proposals since the 1970s for another Mercury mission. In the late 1990s, two missions—MESSENGER and BepiColombo—received the go-ahead; MESSENGER is on its way to its first encounter with Mercury in January 2008. The history, scientific objectives, mission designs, and payloads of both these missions are described in detail.     

防护涂层对Ni_3Al基合金IC6AE微观组织和抗腐蚀性能的影响

采用料浆法和粉末包埋渗法在Ni3Al基等轴晶合金IC6AE上分别制备了Al-Si和NiCr-CrAl涂层,并对Al-Si和NiCr-CrAl涂层及不加涂层的IC6AE合金三种试样进行900℃/20h,40h,60h,80h,100h的涂盐(5wt%NaCl 95wt%Na2SO4)抗腐蚀性能试验.试验结果表明,与Al-Si涂层试样和无涂层IC6AE合金试样相比,NiCr-CrAl涂层试样表现出最好的抗热腐蚀性能;与无涂层的IC6AE合金试样相比,Al-Si涂层试样的抗腐蚀性没有明显的改善.微观结构分析表明,无涂层的IC6AE合金在900℃时经过几个小时后就遭到了严重的腐蚀破坏.涂盐腐蚀100h后,表面生成了一层主要由Mo,Ni的氧化物组成的多孔无保护性的疏松层.对于Al-Si涂层的试样,900℃/100h腐蚀后试样表面生成了大量Mo,Ni的氧化物,此外还有少量Al2O3及NiAl3相,这些相对样品有一定的保护作用.涂覆NiCr-CrAl涂层的样品经900℃/100h腐蚀后,试样表面主要生成了连续致密的Al2O3及NiAl2O4层,并有少量的Mo,Ni的氧化物,因此对合金有着较好的保护作用,抗腐蚀性能得到了显著改善.     

Microstructure,porosity and mechanical properties of selective laser melted AlSi10Mg

Finite element modeling (FEM), microscopy, X-ray computed tomography (CT) and mechanical property tests were used to study the microstructure, porosity and mechanical properties of an AlSi10Mg alloy produced by selective laser melting (SLM). The simulation of the melt pool and thermal history under different energy densities produced an optimized result with an energy density of 44.5 J·mm⁻³. The high cooling rate during the SLM process significantly refined the previous α-Al dendrites. The growth direction of the network-like Al-Si eutectic structure at different orientations confirmed the anisotropic nature of the microstructure. Furthermore, the microhardness, tensile testing and fracture analysis results proved that there were no obvious distinctions in the strength between the transverse and longitudinal directions, and that the ductility was anisotropic, possibly due to the shape and distribution of the pores. The pores measured by X-ray CT at different energy densities confirmed that the sphericity of the pores was inversely related to pores volumes. With optimized processing conditions, the porosity of the selective laser melted sample decreased leading to the improved fabricated fuel system component via SLM.     

不同冶炼工艺对1Cr18Ni10Ti钢夹杂物的影响

通过试验研究了1Cr18Ni10Ti不锈钢的4种冶炼工艺:真空感应+电渣重熔、真空感应(陶瓷过滤器)、真空感应(陶瓷过滤器)+电渣重熔、真空感应+真空自耗,得到钢锭中夹杂物的种类、大小以及数量的变化.对比试验结果可知,采用真空感应(陶瓷过滤器)冶炼工艺与真空感应+真空自耗之后的钢锭的夹杂物水平相当,D类夹杂物数量最少,大颗粒夹杂物占比也最小.     

10cm氙离子推力器变推力特性研究

非重力阻尼的连续、快速、高精度补偿是实现重力梯度测量卫星精细重力场测量的关键技术之一,直接影响到整星工程任务的成败。针对重力梯度测量卫星在轨飞行期间对电推进系统宽范围连续变推力能力的应用需求,分析了10cm氙离子推力器推力调节响应特性。在此基础上,通过对阳极电流、励磁电流和阳极流率等推力高敏感响应参量的组合调节,开展了推力调节试验研究,验证了10cm氙离子推力器宽范围连续变推力调节能力,获得了1～20mN范围内的推力调节性能及其变化规律。试验结果表明：在采用地面供电、供气设备条件下,10cm氙离子推力器能够在100～597W的功率范围内实现0.98～20.29mN的推力宽范围调节,比冲175～3500s,推力分辨率优于50μN。研究为建立10cm氙离子电推进系统的推力控制数学模型及调节控制算法奠定基础。     

Keck observations of ROSAT ultra-luminous X-ray source candidates

We present results of optical follow-up observations of candidate ultra-luminous X-ray sources (ULXs). Using Keck optical spectroscopy, 17 of the candidates from the Colbert and Ptak [Colbert, E.J.M., Ptak, A.F. A catalog of candidate intermediate-luminosity X-ray objects. ApJS 143, 25–45, 2002] catalog have been identified; this is one of the largest sets of optical identifications of such objects thus far. Fifteen are background active galactic nuclei (AGN); two are foreground stars in our Galaxy. These findings are consistent with background and foreground object expectations, as derived from log N–log S relations. Also, the results are briefly discussed in terms of the spiral-galaxy/ULX connection.     

Near-infrared study of open clusters Teutsch 10 and Teutsch 25

The astrophysical parameters have been estimated for two unstudied open star clusters Teutsch 10 and Teutsch 25 using the Two Micron All Sky Survey ($2\mathit{MASS}$) database. Radius is estimated as 4.5 arcmin for both clusters using radial density profiles. We have estimated proper motion values in both RA and DEC directions as $2.28\pm 0.3$ and $-0.38\pm 0.11$?mas?yr^?1 for Teutsch 10 and $0.48\pm 0.3$ and $3.35\pm 0.16$?mas?yr^?1 for Teutsch 25 using $\mathit{PPMXL}$¹ catalog. By estimating the stellar membership probabilities, we have identified 30 and 28 most likely members for Teutsch 10 and Teutsch 25 respectively. We have estimated the reddening as $E(B-V)=0.96\pm 0.3$?mag for Teutsch 10 and $0.58\pm 0.2$?mag for Teutsch 25, while the corresponding distances are $2.4\pm 0.2$ and $1.9\pm 0.1$?kpc. Ages of $70\pm 10$?Myr for Teutsch 10 and $900\pm 100$?Myr for Teutsch 25 are estimated using the theoretical isochrones of metallicity Z?=?0.019. The mass function slopes are derived as $1.23\pm 0.30$ and $1.09\pm 0.35$ for Teutsch 10 and Teutsch 25 respectively. Estimated mass function slope for both the clusters are close to the Salpeter value ($x=1.35$) within the errors. Estimated values of dynamical relaxation time are found to be less than cluster’s age for these objects. This concludes that both objects are dynamically relaxed. The possible reason for relaxation may be due to dynamical evolution or imprint of star formation or both.     

基于FPGA的RS232转429接口电路的设计与实现

介绍用于自动控制设备控制板卡的软硬件设计方法,采用混合输入（包括SCH和VHDL）实现该设计,重点阐述应用ISP开发软件采用VHDL语言实现整个软件接收、控制部分,测试表明设计方法合理有效。