IC制造中平坦化技术的性能与分析

表面平整化技术是半导体工业的关键技术,在一定程度上制约着半导体芯片集成技术的发展,针对多层立体布线的IC全局平坦化技术,介绍了代表当今平整化技术及其未来的发展方向,其中一些技术会取代传统的CMP技术而成为IC产业的主导技术之一;叙述了超大规模集成电路(ULSI)的发展对全局平整化的具体要求;对传统的CMP技术的特点进行了分析;并论述了当今主流的IC平整化技术的原理、性能以及未来的发展方向。     

Galactic Wind: Mass Fractionation and Cosmic Ray Acceleration

The dynamical and chemical effects of the Galactic Wind are discussed. This wind is primarily driven by the pressure gradient of the Cosmic Rays. Assuming the latter to be accelerated in the Supernova Remnants of the disk which at the same time produce the Hot Interstellar Medium, it is argued that the gas removed by the wind is enriched in the nucleosynthesis products of Supernova explosions. Therefore the moderate mass loss through this wind should still be able to remove a substantial amount of metals, opening the way for stars to produce more metals than observed in the disk, by e.g. assuming a Salpeter-type stellar initial mass function beyond a few Solar masses. The wind also allows a global, physically appealing interpretation of Cosmic Ray propagation and escape from the Galaxy. In addition the spiral structure of the disk induces periodic pressure waves in the expanding wind that become a sawtooth shock wave train at large distances which can re-accelerate “knee” particles coming from the disk sources. This new Galactic Cosmic Ray component can reach energies of a few×10¹⁸ eV and may contribute to the juncture between the particles of Galactic and extragalactic origin in the observed overall Cosmic Ray spectrum.     

化学气相渗透法制备碳化硅陶瓷复合材料

综述了化学气相渗透法制备连续纤维增强碳化硅陶瓷复合材料的过程，以及碳化硅陶瓷复合材料的性能及应用。     

国外几种新型微化学推力器

介绍了国外几种以微机电系统 (MEMS)技术为基础的液体和固体微化学推力器。这些新型微化学推力器具有MEMS技术微型化、低成本和批量生产的优点 ,并考虑了体积限制和高度集成等空间限制 ,能产生 10 -6～ 10N·s的推力脉冲 ,可用于微型卫星和纳米卫星的姿态调整、变轨和定向的精确控制。同时阐述了这几种微推力器结构特点和制造工艺 ,并与其他类型的推进器进行了比较     

采用斜坡凹槽稳焰器强化H2超燃的数值研究

用迎风TVD格式求解三维多组分体系的全N－S方程，化学反应源项采用点隐处理，H2和空气的超燃模型用11组分、23步基地反应模型描述，得到了凹槽燃烧室不同截面组元、当量比、压力、温度等值线和速度场的分.布计算结果表明：凹槽稳焰器的回流区可提供高温自由基，有助于超燃点火；火焰在凹槽内和凹槽后斜坡的尾迹中驻定。结果对定量认识凹槽H2超燃流场、设计高效率和优化结构的一体化凹槽有着重要意义。     

有催化剂时改性双基推进剂燃烧模型

在ＢＤＰ模型和ＫＵＢＯＴＡ模型的基础上，提出了适合于有催化剂的改性双基推进剂燃烧模型。计算表明，模型适用于有、无催化剂改性双基推进剂的各种配方，对稳态超速燃烧有较好的模拟效果。     

Effects of the Fabrication Processes of NC-Si:H Films on Their Mechanical Properties

Studies of nanoindentation were performed on nc-Si:H films to evaluate the effects of the fabrication processes on their mechani-cal properties. It is observed that with the decrease of the SiH4 contents, the grain size of the films increases gradually, and as does the crystalline volume fraction. The smaller the grains become, the more homogeneous the films, and the more even the hardness as well as the modulus will be. The hardness and the modulus will increase with the substrate’s temperature rising. The hardness and the modulus of the nc-Si:H films on the Si substrate prove to be higher than those on the glass substrate given the same technology parameters. How-ever, the films on the glass substrate appear to be more homogeneous.     

喷射沉积过程中显微组织的形成机制

通过对沉积还纵剖面的组织分析，发现沉积坯在进缘、上下表面及中心部位的显微组织明显不同。边缘及上下表面区试样的退火试验研究表明，细小的枝晶碎块在高温退火过程中发生凝共和粗化，并导致近球状晶粒组织的形成。试验确定其生长服从：D2-D02=6.37×1020e(-70036.1/T)·τ，晶界迁移激活能Qg=582KJ／mol。并依赖于两种机制：（1）在喷射沉积过程中无强烈变形枝晶的均匀化；（2）变形及断裂枝晶的生长和粗化。     

铜基高温钎料中钴作用机制的研究

探讨了Cu-Zn-Mn-Co钎料中钴的变质剂作用机理,为高温钎料的研制提供了实验基础研究。     

Parylene真空涂覆新工艺研究

简述了Parylene真空沉积的机理,并对采用Parylene真空涂覆的涂层样件进行了全面的性能摸底试验。