| 类金刚石膜的制备及应用 |
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| 引用本文： | 卫中山,左敦稳.类金刚石膜的制备及应用[J].航空精密制造技术,2004,40(1):20-23. |
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| 作者姓名： | 卫中山 左敦稳 |
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| 作者单位： | 南京航空航天大学机电学院,南京,210016 |
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| 摘 要： | 介绍了类金刚石膜DLC的形成原理、制备方法和发展现状,总结了DLC在机械、电子、声学、光学和医学等领域的应用状况以及存在的问题。
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| 关 键 词： | 类金刚石膜 制备方法 应用 |
| 文章编号： | 1003-5451(2004)01-0020-04 |
| 修稿时间： | 2003年1月9日 |
Fabrication and Applications of Diamond-like Carbon Films |
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| WEI Zhong-shan,ZUO Dun-wen.Fabrication and Applications of Diamond-like Carbon Films[J].Aviation Precision Manufacturing Technology,2004,40(1):20-23. |
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| Authors: | WEI Zhong-shan ZUO Dun-wen |
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| Abstract: | The synthesis theory, deposition methods, development and prospect of diamond-like carbon films (DLC) are introduced. Its applications in the fields of machinery, electronics, acoustics, computer, optics and medicine are summarized. Existing problems are described. |
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| Keywords: | diamond-like carbon films deposition method application |
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