自由曲面光学元件检测方法研究

本文提出了一种通过检测数据重构自由曲面进行面形误差计算的方法。首先,通过轮廓检测设备,采用回转法测量自由曲面光学元件得到测量数据,然后,利用matlab进行重构算法实现,插值计算得到面形误差。最后,通过测量标准球面,将计算结果与激光干涉仪的结果进行对比试验,面形PV值符合,验证了该方法的有效性,为以后进行自由曲面磨抛加工提供了依据。

Study on Testing of Free-form Surface Optical Work-pieces

A key measure data reconfiguration algorithm was investigated to calculate free-form surface error. The free-form surface work-pieces was measured by profile meter used rotation method. The algorithm was implentmented by Matlab using deviation calculation to get surface error. The result is that according with the data of laser interferometer by measured standard sphere, the surface error PV value fit together, so this method is verified and passed. It demonstrates the algorithm can provides basis for bonnet polishing of free-form surface optical work-pieces.