谐振式硅微传感器闭环系统动态特性影响因素

动态特性是传感器的一个重要的性能指标。本文分析了基于幅频特性的谐振式硅微压力传感器闭环系统的动态特性及其影响因素,并进行了相应的实验研究。由基于幅频特性的闭环系统内部控制过程得到影响闭环系统动态特性的因素有三个：谐振器固有频率对压力的响应时间;谐振器稳定振动的建立时间;信号处理与数据处理时间。对闭环系统内部控制过程及实验结果的分析表明,谐振器稳定振动的建立时间为主要因素。研究结果为设计闭环系统动态特性改善方案提供了依据。

Dynamic Characteristic Influence Factors of Resonant Silicon Micro-structure Sensor Closed-loop System

Dynamic characteristic is one of the most important performance indexes of sensor.The dynamic characteristic influence factors of pressure sensor closed-loop system based on the magnitude frequency characteristic are analyzed and relevant experiment has been conducted.There are three main factors according to the principle of the closed-loop system.The first is the response time of the resonator＇s natural frequency to pressure.The second is the steady vibration establishing time of the resonator.The last one is the signal and data processing time.Experimental data show that the major influence factor is the steady vibration establishing time of the resonator.This result provides a design guideline for improving the dynamic characteristic of the closed-loop system of resonant pressure sensor.