高均匀扫描电机轴面不平行度动态测量方法研究

为了解决高均匀扫描电机转动轴位置未知时与反射镜面不平行度的测量问题，提出了一种动态的光电测量方法；在激光测量光路中，利用扫描电机在位置敏感传感器（PSD）上的扫描曲线，并根据光学成像原理和扫描曲线的外形特征，设计了一个光学实验系统；利用实验方法建立了轴面俯仰角度与扫描曲线形状的关系式，最后对扫描电机轴面不平行度的特性进行了测试分析。实验表明，此种测量方法能够很好地解决动态测量扫描电机轴面不平行度的问题。

Dynamic Measurement Methods of Unparailelism of High Uniform Scanning Motor Shaft and Mirror

In order to address the problem of measuring the unparallelism of high uniform scanning motor shaft whose position is unknown and the surface of mirrors, a dynamic optical measurement method is proposed in the light path of the laser measurement, making use of the curve which is drawn by the scanning motor on the position sensitive detector （PSD） , and according to the principle of optical imaging and the characteristics of the scanning curve＇s shape, an optical test system is designed. The relationship between the axial tilt angle and scanning curve shape is established using experimental methods. Finally, the characteristics of the unparallelism of the scanning motor shaft and the surface of mirror are tested and analyzed. Experiments show that such measurements can solve the problem of dynamic measurement that the scanning motor shaft is not parallel to the surface of mirror.