| 一种用于液晶曝光中的激光检测系统 |
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| 引用本文： | 杨韧,林闽. 一种用于液晶曝光中的激光检测系统[J]. 宇航计测技术, 1999, 19(3): 29-34 |
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| 作者姓名： | 杨韧 林闽 |
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| 作者单位： | 清华大学 |
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| 摘 要： | 介绍了一种非接触式激光检测系统，可用于检测液晶曝光中液晶模板与基板之间的间隙，给出了该种系统的测量原理、硬件系统、信号处理方法、测量结果、分辨力和误差分析，并指出了这种测量系统的应用。
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| 关 键 词： | 液晶 三角测量 激光测隙仪 |
Laser measurement system used to measure the clearance in liguid crystal exposure |
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| Yang Ren Lin Min Dong Bin Li Yingpeng Liu Xingzhan You Zheng. Laser measurement system used to measure the clearance in liguid crystal exposure[J]. Journal of Astronautic Metrology and Measurement, 1999, 19(3): 29-34 |
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| Authors: | Yang Ren Lin Min Dong Bin Li Yingpeng Liu Xingzhan You Zheng |
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| Affiliation: | Yang Ren Lin Min Dong Bin Li Yingpeng Liu Xingzhan You Zheng |
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| Abstract: | Describes an non contact laser measurement system, which can be used to measure the clearance between the mask and the base board in liguid crystal exposure. The principle, hardware, software, measurement result, resolution and error analysis are given. Because its advantage, it can be used in the liguid crystal production. |
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| Keywords: | Liquid crystal Triangulation Laser clearance finder |
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