| 纳米测量方法及其研究进展综述 |
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| 引用本文： | 裴雅鹏. 纳米测量方法及其研究进展综述[J]. 宇航计测技术, 2007, 27(6): 23-27 |
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| 作者姓名： | 裴雅鹏 |
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| 作者单位： | 北京航天计量测试技术研究所,北京,100076 |
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| 摘 要： | 综述了纳米测量方法,主要可归纳为光学和非光学两大类测量技术。通过对各种方法的测量原理、测量装置、测量准确度及其亟待解决问题的分析,阐明了纳米测量技术的发展现状、发展趋势,对纳米测量技术的发展具有一定的推动和指导作用。
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| 关 键 词： | 纳米技术 测量 激光干涉仪 |
| 文章编号： | 1000-7202(2007)06-0023-05 |
| 修稿时间： | 2007-01-23 |
Review of Techniques and Developmentof Nanometre Measurement |
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| PEI Ya-peng. Review of Techniques and Developmentof Nanometre Measurement[J]. Journal of Astronautic Metrology and Measurement, 2007, 27(6): 23-27 |
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| Authors: | PEI Ya-peng |
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| Abstract: | Many techniques of nanometre measurement are introduced,including both optics and non-optics.Theories,accuracy,equipment and problems of these techniques have been analyzed respectively and the present development and future direction are illuminated.This review will play a promote and guiding role in nanometre measurement. |
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| Keywords: | Nanometre technology Measurement Laser interferometer |
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