MEMS 壁面剪应力传感器阵列水下标定实验研究

壁面剪应力的精确测量对于研究水下物体边界层流动、寻求有效的减阻增效措施至关重要。MEMS 壁面剪应力传感器的标定首先是最基本的静态标定,其决定了其测量的精度和数据的可信度。本文在分析已有标定方法的基础上研发1种新型水下壁面剪应力给定装置,并采用数值方法计算分析不同流速下的壁面剪应力给定条件,进而设计壁面剪应力传感器静态标定方案,开展了一种 MEMS 热膜式壁面剪应力传感器阵列的水下静态标定实验,获得了各传感单元的标定系数。

Calibration of MEMS wall shear-stress-sensors array for underwater applications

The measurement of wall shear stress on hydrodynamic surface is important for the design of advanced naval technology,and,accurate calibration,especially the static calibration, of the shear stress sensor is indispensable to any practical measurement.In the paper,an under-water calibration apparatus is developed based on analyzing the existing calibration methods.CFD simulation is performed to predict the wall shear stress input for the static calibration,and facili-tate the design of calibration schedule.Then a typical thermal MEMS shear-stress-sensors array is statically calibrated for underwater applications.The calibration coefficients of the sensors in the array are obtained in situ,which would be of use to the future underwater model tests.