一种薄膜热电堆热流传感器灵敏度系数的实验研究

为应对长时间、高频响、高热流密度条件下的热流密度测试要求，通过热沉体设计发展了一种新型热阻式薄膜热电堆热流传感器，并利用对比标定的方法、采用辐射标定方式确定各个此类型传感器的灵敏度系数。标定实验数据表明：该类型热流传感器的灵敏度系数与感应面温度相关，且在高于一定温度之上校正关系式不同于以往的线性关系而呈现出二次非线性关系。通过分析可知：呈现出二次非线性校正关系式的原因主要是依赖于温度的热阻层导热系数以及薄膜热电偶Seebeck 系数。实验数据以及分析结果为该类型热流传感器的标定和优化设计提供了参考，同时确保了该类型热流传感器在使用过程中获得准确、可靠的热流测试数据。

Calibration Tests on a New Thin-film Thermopile Heat-flux Sensor

A new thin-film thermopile heat-flux sensor is fabricated with heat-sink bulk to meet the measuring demands of long time, high frequency-response and high heat-flux density. And the transfer calibration method with radiant heat source is applied to calibrate thin-film thermopile heat-flux sensors for sensitivity coefficients. The calibration results show that sensitivity coefficients of the thin-film thermopile heat-flux sensors are dependent on surface temperatures, and the correction function is a quadratic polynomial, which is different from original linear one, when the surface temperature is higher than some value. The reasons for the difference are tempera-ture-dependent thermal conductivity of thin-film thermal resistance layers and Seebeck coefficient of thin-film thermocouples. Calibration tests and analytical results provide reference examples for calibrating and redesigning the thin-film thermopile heat-flux sensors, and the measured heat-flux density data is accurate and reliable when the calibrated sensors are used in practice.