高时间分辨力瞬态热反射显微热成像装置

瞬态热反射显微热成像能够测量电子器件表面温度分布，兼具高时间分辨力和高空间分辨力，在GaN HEMT等大功率器件热测试中应用日益广泛。研发了瞬态热反射显微热成像装置，利用窄脉冲照明，捕捉特定短时间内被测器件表面的图像，实现瞬态热反射热成像，时间分辨力达到1 μs。以微带电阻作为被测器件开展了瞬态测温实验，激励脉宽10 μs，测试得到了不同时刻微带电阻上温度分布，可以观察到升温和降温过程的细节，温度上升和下降时间在（2~3） μs，有效验证了装置的时间分辨力性能。

High Temporal Resolution Transient Thermoreflectance Microscope

Transient thermoreflectance microscopy is capable of capturing surface temperature distribution of electronic devices with both high temporal resolution and high spatial resolution,and is widely used in thermal characterization of high-power devices like GaN HEMT.A setup of high temporal resolution transient thermoreflectance microscope was developed,adopting short pulsed illumination to capture the image of DUTs surface at specific moments.Temporal resolution up to 1 μs was achieved.Experiments were taken on micro-resistor to observe the transient thermal response to pulsed drive with 10 μs duration.Thermal images of the resistor at different moments were captured,providing details of the heating and cooling process.JP2]The rising and falling time of the temperature of the micro-resistor were (2~3) μs,which confirmed the claimed temporal resolution.