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| 薄膜硬度计算方法 | |
| 引用本文： | 周,亮,刘亚龙,聂文杰,郭永泽.薄膜硬度计算方法[J].宇航材料工艺,2010,40(3). |
| 作者姓名： | 周 亮 刘亚龙 聂文杰 郭永泽 |
| 作者单位： | 哈尔滨工业大学机电工程学院,哈尔滨,150001 |
| 基金项目： | 哈尔滨工业大学科研创新基金 |
| 摘 要： | 为了将薄膜本征硬度从所测复合硬度中提取出来,目前有很多计算或描述的模型和方程。本文介绍了目前提出的计算薄膜硬度的方法和模型,对各方法和模型进行了分析比较,并对其未来发展方向进行了展望。 |
| 关 键 词： | 薄膜 硬度 计算方法 |
Calculating Method in Thin Films Hardness |
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| Zhou Liang,Liu Yalong,Nie Wenjie,Guo Yongze.Calculating Method in Thin Films Hardness[J].Aerospace Materials & Technology,2010,40(3). | |
| Authors: | Zhou Liang Liu Yalong Nie Wenjie Guo Yongze |
| Institution: | School of Mechanical and Electrical Engineering,Harbin Institute of Techno1ogy |
| Abstract: | To obtain the instinct hardness of the films alone from the experimental measurements, several models or functions exist to describe this phenomenon. Most models or functions at present are introduced compared and ana lyzed, their advantages and disadvantages are presented, and the future tendency of nano-indentation hardness calcu lation and measurement methods is presented. |
| Keywords: | Thin films Hardness Calculating method |
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