| 用于合成金刚石薄膜的微波等离子体CVD系统 |
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| 引用本文： | 霍晓,任家烈. 用于合成金刚石薄膜的微波等离子体CVD系统[J]. 航空材料学报, 1994, 14(3): 42-47 |
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| 作者姓名： | 霍晓 任家烈 |
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| 作者单位： | 清华大学 |
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| 摘 要： | 研制了一套功率容量大、结构合理、工作稳定的微波等离子体ＣＶＤ系统。描述了系统的基本结构和性能，讨论了它的特点。作者利用该系统，在单晶Ｓｉ等衬底材料上成功地合成了金刚石薄膜。
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| 关 键 词： | 微波等离子体，CVD，金刚石薄膜 |
A MICROWAVE PLASMA CVD SYSTEM FOR SYNTHESIS OF DIAMOND FILM |
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| Huo Xiao, Ren Jialie,Lu Anli. A MICROWAVE PLASMA CVD SYSTEM FOR SYNTHESIS OF DIAMOND FILM[J]. Journal of Aeronautical Materials, 1994, 14(3): 42-47 |
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| Authors: | Huo Xiao Ren Jialie Lu Anli |
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| Affiliation: | Tsinghua University |
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| Abstract: | Amicrowave plasma CVD system,which has high power capability,reasonable configuration and oper-ates stably,has been developed.In this paper,the basic configuration and performance of the system aswell as its features are described.Using this system,a synthesis of diamond film on various substratessuch as single crystal silicon has been achieved successfully. |
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| Keywords: | microwave plasma CVD diamond film |
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