| 准LIGA技术的研究与发展 |
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| 作者姓名： | 游余新 王东红 陈伟平 |
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| 作者单位： | 哈尔滨工业大学 |
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| 摘 要： | 介绍近年来准ＬＩＧＡ技术发展的概况，着重讨论国内外对它的各个工艺过程所采取的一些措施及其在微传感器和微执行器中的应用，并简单论述它的发展趋势。
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| 关 键 词： | 准LIGA技术 微传感器 微执行器 |
Research and Development of Quasi LIGA |
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| Authors: | You Yuxin Wang Donghong Chen Weiping Yu Dun |
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| Institution: | You Yuxin Wang Donghong Chen Weiping Yu Dun |
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| Abstract: | The recent development of quasi LIGA is introduced in this paper.Discussions are focused on the methods which have been adopted in each process and the applications in the micro sensors and micro actuators. Inaddition,the trends of the quasi LIGA development are briefly described. |
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| Keywords: | Quasi LIGA Micro Sensor Micro actuator |
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