基于弹性体模型的微机械陀螺检测电容解析方法

以体微机械加工技术制备的音叉式振动型微机械陀螺为研究对象，以提高其检测电容的解析精度为目的，利用多自由度动态有限元解析理论，首次提出了基于弹性体模型的检测电容解析法。实现了考虑制备工艺、加工手段等引起的微陀螺结构缺陷造成的性能、品质变异仿真，以及面向微陀螺最终输出性能——检测电容的动力学特性与检测特性的分析。此方法基本解决了刚体结构微机械陀螺简化模型的低精度缺陷问题，为实现其多物理场工作环境的表征、结构拓扑形态的设计、复杂动态性能的仿真等工程化目标提供了可能。

Detection Capacitance Analysis Method for A Micromachined Gyroscope Based on Elastic Body Model

The performance oriented detection capacitance analysis method based on the elastic body model for the tuning fork vibratory micromachined gyroscope is first put forward to improve the analytical precision of detection capacitance by employing a dynamic finite element. The simulation of microgyroscope performance variance, which is due to the structural variance inevitably introduced by the process of practical bulk silicon machining, is achieved. Meanwhile, the analysis of the final output characteristics, namely the dynamic characteristics of the detection capacitance of the microgyroscope, is accomplished. In this way, the low analytical precision problem caused by the general simple rigid body model of the microgyroscope can basically be removed. Furthermore, some complicated engineering objectives for the microgyroscope, such as the expression of multiphysics environment, the design of structural topology, and the simulation of intricate dynamic performance, can be achieved.