静电驱动悬臂梁式微开关的动态特性分析

通过建立静电驱动悬臂梁式微开关的非线性动力学简化模型，利用数值方法求解出系统的动态响应特性，得到了动态吸合电压和开关吸合时间的关系，并详细分析了其动态响应中的非线性现象以及动态特性和静态特性的不同。计算结果表明，动态吸合电压并不是唯一的；随着动态吸合电压的增大，吸合时间逐渐变小；微悬臂梁的动态响应周期随着驱动电压的增大而增大；动态临界电压低于静态临界电压，这些动态特性与静态特性有着明显的不同。

Dynamic Characteristics Analysis of Micro-Machined Switch Consisting of Electrostatically-Driven Cantilever Beam

A nonlinear dynamic simplified model of a micro-machined switch consisting of electrostatically-driven cantilever beam is established. Numerical method is used for analyzing the dynamic characteristics of a cantilever beam in a micro-machined switch. The relationship between the dynamic pull-in voltage and the pull-in time is gained. The nonlinear phenomena of the dynamic response and the differences between the dynamic characteristics and the static characteristics are discussed in detail. The results indicate that the dynamic pull-in voltage is not one and only, and the pull-in time decreases when the dynamic pull-in voltage increases. The dynamic response period of micro-machined switch increases with increasing of applied voltage. The dynamic critical voltage is less than the static critical voltage. These dynamic characteristics are evidently different from the static analysis.