恒压式气体微流量计的测量误差分析

恒压式气体微流量计（ＣＰＦＭ）被多个国家级实验室选作为计量学设备，用来校准真空规和真空漏孔。该文从理论上对ＣＰＦＭ和带参考室的ＣＰＦＭ的流量测量误差进行了分析。测量过程中温度波动和压力波动对ＣＰＦＭ的流量测量误差作用较大。为ＣＰＦＭ增加一个适当的参考室，可以减小测量过程中变容室温度变化对ＣＰＦＭ的流量测量误差的贡献。

Error Analysis of Measurement of Constant Pressure Flowmeter

The constant pressure flowmeters (CPFMs) were used to calibrate vacuum leaks and vacuum gauges in some national laboratories.The errors of measurement of CPFM and CPFM with a reference chamber were theoretically analyzed in the paper.The variation of temperature and pressure in the measurement process is one of the main parts of measurement errors.With the aid of a reference chamber,the error of measurement contributed by the variation of temperature in the variable chamber can be reduced.