| 射频感性耦合等离子体中的受迫振荡研究 |
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| 引用本文： | 孙景超,丁振峰.射频感性耦合等离子体中的受迫振荡研究[J].沈阳航空工业学院学报,2009,26(1). |
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| 作者姓名： | 孙景超 丁振峰 |
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| 作者单位： | 1. 沈阳航空工业学院理学院,辽宁,沈阳,110136
2. 大连理工大学三束实验室,辽宁,大连,116024 |
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| 摘 要： | 实验研究了匹配状态、放电气压对氩气射频感性耦合等离子体中受迫振荡的影响.结果表明:受迫振荡总是出现在放电的正反馈区;在高气压下(>30Pa)受迫振荡的频率较低.对于使用射频感性耦合等离子体进行薄膜沉积的参数选择给予了理论指导.
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| 关 键 词： | 射频感性耦合等离子体 受迫振荡 模式转化 |
The study of driven oscillation in inductively coupled plasma |
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| SUN Jing-chao,DING Zhen-feng.The study of driven oscillation in inductively coupled plasma[J].Journal of Shenyang Institute of Aeronautical Engineering,2009,26(1). |
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| Authors: | SUN Jing-chao DING Zhen-feng |
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| Institution: | 1.Shenyang Institute of Aeronautical Engineering;Liaoning Shenyang 110136;2.Dalian University of Technology State Key Laboratory of Materials Modification by Laser;Ion and Electron Beams;Liaoning Dalian 116024 |
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| Abstract: | A low-frequency oscillation-driven oscillation in ICP by Ar discharging is found near mode transition.The oscillation's region and cause are studied in the experiment,and the influence of pressure is also measured.It is found that driven oscillation occurs in the positive feedback region which is established basing on the influencing of stray capacitor in impedance matching work to the output power of radio-frequency power supply.As the changing of pressure,at high pressure(>30Pa) the frequency of driven os... |
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| Keywords: | ICP mode transition driven oscillation |
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