| X射线光刻机中应用的精密定位工作台 |
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| 引用本文： | 嵇钧生.X射线光刻机中应用的精密定位工作台[J].航空精密制造技术,1998(3). |
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| 作者姓名： | 嵇钧生 |
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| 作者单位： | 中国航空精密机械研究所 |
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| 摘 要： | 为适应超大规模集成电路器件的发展，微电路图形的特征线宽愈来愈细的特点，发展了电子束光刻及Ｘ射线光刻，而Ｘ射线光刻由于其极高的分辨率，对未来的大规模集成电路器件的制作具有很大的应用潜力。随之而来的是要有高精度的定位工作台，以保证高套刻精度的要求。
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| 关 键 词： | 集成电路器件的制造 高精度定位工作台 气浮丝杠驱动机构 激光测量系统 |
Precision Location Platform Used in X-ray Photoetching Machine |
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| Ji Junsheng.Precision Location Platform Used in X-ray Photoetching Machine[J].Aviation Precision Manufacturing Technology,1998(3). |
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| Authors: | Ji Junsheng |
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| Institution: | Ji Junsheng |
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| Abstract: | In order to keep the development of super Large-scale Integrated circuit device, the width of characteristics curve is becoming thinner and thinner. And then electronic beams and X-rays are used in photoetching. Because of its high resolution ratio, X-ray has great potentialities of application in the manufacturing of LSI circuit device. This paper briefs above and also tells that high-precision locating platform is necessary to ensure the high alignment precision. |
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| Keywords: | manufacturing of integrated circuit device high-precision locating platform air-float screw driving machanism laser measure system |
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