| 几种MEMS分立式微变形镜的设计与性能比较 |
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| 引用本文： | 乔大勇,饶伏波,苑伟政,姜澄宇. 几种MEMS分立式微变形镜的设计与性能比较[J]. 航空精密制造技术, 2005, 41(5): 5-8 |
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| 作者姓名： | 乔大勇 饶伏波 苑伟政 姜澄宇 |
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| 作者单位： | 西北工业大学微/纳米系统实验室,西安,710072;西北工业大学微/纳米系统实验室,西安,710072;西北工业大学微/纳米系统实验室,西安,710072;西北工业大学微/纳米系统实验室,西安,710072 |
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| 基金项目： | 国家自然科学基金重大专项资助项目(90407020)，西北工业大学博士论文创新基金资助项目 |
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| 摘 要： | 采用形状函数法描述变形镜校正时的曲面,从适配误差、Strehl比、加工工艺性三个方面比较了4种不同单元排列方式的微变形镜。结果表明方形排列的微变形镜设计简单,需驱动电压较低,但波前校正性能较差;圆形微变形镜性能最优,但设计复杂,需驱动电压最高。
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| 关 键 词： | 微机电系统 自适应光学技术 微变形镜 排列方式 |
| 文章编号： | 1003-5451(2005)05-0005-04 |
| 修稿时间： | 2005-01-14 |
Design and Comparison of Several Segmented Micro Deformable Mirrors |
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| QIAO Da-yong,RAO Fu-bo,YUAN Wei-zheng,et al. Design and Comparison of Several Segmented Micro Deformable Mirrors[J]. Aviation Precision Manufacturing Technology, 2005, 41(5): 5-8 |
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| Authors: | QIAO Da-yong RAO Fu-bo YUAN Wei-zheng et al |
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| Abstract: | Shape functions were used to describe the surfaces of the micro def ormable mirrors in working state,and four kinds of micro deformable mirrors wit h different arrays were simulated in aberrated wavefronts correction.Their perf ormances were compared from fitting error,Strehl ratio and the difficulty of ma sk design.The results show that the square array is easiest to be designed and needs low drive voltage but its performance is not good.The circular array perf orms best but is more difficult to be designed and needs the highest drive voltage. |
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| Keywords: | microelectromechanical system adaptive optics micro deformable mirrors array distribution |
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