| 光刻技术在金属板片刻蚀上的应用 |
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| 引用本文： | 宁建华. 光刻技术在金属板片刻蚀上的应用[J]. 火箭推进, 2010, 36(1): 54-57 |
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| 作者姓名： | 宁建华 |
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| 作者单位： | 西安航天动力研究所,陕西西安,710100 |
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| 摘 要： | 介绍了应用双面自对准光刻技术刻蚀金属板片的工艺原理、方法、工艺参数的选取原则以及双面自对准光刻模具设计准则,该项技术已成功应用于液体火箭发动机层板喷注器和膜片阀的研制和生产之中。
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| 关 键 词： | 光刻技术 层板喷注器 膜片阀 |
Application of photoetching technique in metal diaphragm |
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| Ning Jianhua. Application of photoetching technique in metal diaphragm[J]. Journal of Rocket Propulsion, 2010, 36(1): 54-57 |
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| Authors: | Ning Jianhua |
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| Affiliation: | Ning Jianhua (Xi＇an Aerospace Propulsion Institute, Xi＇an 710100,C hina ) |
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| Abstract: | Technology principle, method and principle of parameters determiantion of double-face self-aligning photoetching technology in metal diaphragm were introduced in this paper. The technique has been applied in platelet injector and diaphragm valve of liquid rocket engines. |
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| Keywords: | photoetching technique platelet injector diaphragm valve |
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