气浮支承式触针测量系统径向动态性能研究

触针表面形貌测量仪是生产科研中应用广泛的仪器,杠杆式触针由于其结构原因,在测量时会产生非线性误差,影响测量结果的精度。介绍了一种气浮触针式测量传感器,触针轴运动方向与位移测量方向一致,有效地避免了非线性误差;在研究中建立了气浮支承式触针测量系统的运动模型,分析了测量系统的动静态特性,研究了影响气浮支承径向动态性能的因素,进行了径向刚度和动态参数的理论仿真模拟,并通过动态特性试验测试和分析得到传感器最大扫描频率为125Hz;搭建了气浮触针式表面形貌测量系统并进行测量试验,得到传感器测量的相对误差为0.8%。

Research on Radial Dynamic Performance of Air Bearing Support Stylus Measuring System

The stylus surface topography measuring instrument is widely used in production and scientific research.Because of its structure,the lever stylus will produce nonlinear error in measurement,which will affect the accuracy of measurement results.This paper introduces a kind of air bearing stylus measuring sensor.The movement direction of the stylus axis is consistent with the displacement measurement direction,which effectively avoids the nonlinear error.In the research,the movement model of the air bearing stylus measuring system is established,the dynamic and static characteristics of the measuring system are analyzed,the factors affecting the radial dynamic performance of the air bearing support are studied,the theoretical simulation of radial stiffness and dynamic parameters is carried out,and the maximum scanning frequency of the sensor is 125Hz through the dynamic characteristic test and analysis;the air bearing stylus surface topography measurement system is built and the measurement experiment is carried out,and the relative error of the sensor measurement is 0.8%.