| 氦质谱检漏技术的研究与实践 |
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| 引用本文： | 濮荣强,黄文平.氦质谱检漏技术的研究与实践[J].宇航计测技术,2012,32(6):21. |
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| 作者姓名： | 濮荣强 黄文平 |
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| 作者单位： | 1、芜湖信息技术职业学院电子信息系，芜湖 241000；
2、安徽皖仪科技股份有限公司， 合肥 231088 |
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| 摘 要： | 在氦质谱检漏技术理论的基础上，采用了以微电脑为中心的自动控制技术，提高了氦质谱检漏仪的全自动操作智能化水平。180°非均匀磁场的实现，使离子聚焦更好。通过电子量程切换技术，减少了量程转换时间，扩大了测量范围，对高准确度密封性智能检测系统的实现进行了详细的研究与实践。
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| 关 键 词： | 真空测试 氦质谱 检漏 |
Studied Practices of Helium Mass Spectrometer to Leaking Detection Technology |
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| PU Rong-qiang,HUANG Wen-ping.Studied Practices of Helium Mass Spectrometer to Leaking Detection Technology[J].Journal of Astronautic Metrology and Measurement,2012,32(6):21. |
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| Authors: | PU Rong-qiang HUANG Wen-ping |
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| Institution: | 1、Wuhu Vocational College of Information Technology, Anhui Province, Wuhu 241000；;
2、Anhui Wayee Science and Technology Co,Ltd,Anhui Province, Hefei 231088 |
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| Abstract: | Introducing the theoretical basis of helium mass spectrometer to leaking detection technology,the automatic control technology is used here , which improves intelligent level and reduces the range switching time and expands the measuring range with the helps of both 180° non-uniform magnetic field for ion focus and electronic range switching . The paper gives the studied practices to high precision sealed intelligent detection system in detail. |
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| Keywords: | Vacuum test Helium mass spectrometer Leaking detection |
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