战术导弹用MEMS陀螺仪研制进展及关键技术

MEMS陀螺仪具有体积小、质量轻、启动快、可靠性高、价格低、易于大批量生产、能承受恶劣环境条件等突出优势,可广泛应用于防空导弹、反坦克导弹、便携式导弹、航空制导炸弹等制导武器.介绍了MEMS陀螺仪的基本原理、发展现状,分析了战术导弹对MEMS陀螺仪的应用需求,指出了MEMS陀螺仪在战术导弹型号应用中需解决微机械加工工艺、全温性能指标、复合力学环境等关键技术问题,对MEMS陀螺仪在战术导弹中的应用具有指导意义.

Research on Progress and the Key Technology of MEMS Gyroscope in Tactical Missile

MEMS gyroscope have outstanding advantages, such as small volume, light weight, quick start, high reliability, low price, easy mass production, and able to withstand harsh environmental, et al. It is the inevitable choice of tactical missile, for example air defense missile, antitank missile, portable air defense missile, and aerial guided bomb. This paper introduced the basic principle and development status of MEMS gyroscope, analyzed the application requirements of MEMS gyroscope in tactical missile, pointed out the key technical problems, such as micromachining technology, full temperature performance index, complex mechanical environment. It has guiding significance to the application of MEMS gyroscope in tactical missile