| 纳米计量的溯源与传递 |
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| 引用本文： | 王岳宇.纳米计量的溯源与传递[J].宇航计测技术,2010,30(1):75-79. |
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| 作者姓名： | 王岳宇 |
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| 作者单位： | 北京东方计量测试研究所,北京9628信箱,100086 |
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| 摘 要： | 介绍了纳米计量溯源到国际基本单位制(SI)的传递过程。回顾了国内外计量型扫描探针显微镜(Scanning Probe Microscope,SPM)的工作原理及其溯源性。论述了目前主要纳米计量参数、溯源用标准样本的研究概况。
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| 关 键 词： | 纳米 计量 溯源 +扫描探针显微镜 |
Traceable Transfer for Nanometrology |
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| WANG Yue-yu.Traceable Transfer for Nanometrology[J].Journal of Astronautic Metrology and Measurement,2010,30(1):75-79. |
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| Authors: | WANG Yue-yu |
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| Institution: | WANG Yue-yu (Beijing Orient Institute of Measurement ＆ Test,Beijing 100086) |
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| Abstract: | Transfer chain of nanometrology traceability to the International System of Units(SI)is introduced.And the principle and the measurement traceability of metrological scanning probe microscope in China and abroad is reviewed.Then,the research overview of the nanometrology parameters and traceable standard samples is described. |
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| Keywords: | Nanometer Metrology Trace ~+SPM |
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