| 纳米力学测试系统位移传感器校准装置 |
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| 引用本文： | 任冬梅,朱振宇,万宇,王少飞.纳米力学测试系统位移传感器校准装置[J].航空计测技术,2011(5):3-5,26. |
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| 作者姓名： | 任冬梅 朱振宇 万宇 王少飞 |
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| 作者单位： | 中航工业北京长城计量测试技术研究所,北京100095 |
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| 基金项目： | “十一五”计量科研计划项目资助（J052008A001） |
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| 摘 要： | 介绍了用激光干涉方法对纳米力学测试系统位移传感器进行校准的方法,并建立了校准装置;采用平衡式光学系统设计,干涉系统的抗干扰能力得到了显著提高,通过零位移测量实验对装置的稳定性进行了验证;用校准装置对TriboIndenter纳米力学测试系统的位移传感器进行了校准实验,测量不确定度分析结果表明该系统测量压头位移的准确度可以达到纳米量级。
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| 关 键 词： | 干涉仪 微位移测量 纳米压入 校准 |
Device for Calibration of Displacement Transducer of Nanoindentation Instrument |
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| REN Dongmei,ZHU Zhenyu,WAN Yu,WANG Shaofei.Device for Calibration of Displacement Transducer of Nanoindentation Instrument[J].Aviation Metrology & Measurement Technology,2011(5):3-5,26. |
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| Authors: | REN Dongmei ZHU Zhenyu WAN Yu WANG Shaofei |
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| Institution: | (Changcheng Institute of Metrology ＆ Measurement,Beijing 100095,China) |
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| Abstract: | A method for calibrating the displacement transducer of a nanoindentation instrument using laser interferometer is presented,and a calibration device is set up.The balanced optical system design makes this device have high stability,which is verified by a zero-displacement test.The displacement of the indenter of a nanoindentation instrument is calibrated using this device,and the results are given.Preliminary experiments and uncertainty analysis show that this interferometeric device should be able to measure the displacement of indenter of a nanoindentation instrument with characteristic uncertainty at nanometer level. |
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| Keywords: | interferometer micro-displacement measurement nanoindentation calibration |
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