| 高速精密激光干涉测量的研究现状及其关键技术 |
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| 引用本文： | 李东光,张国雄.高速精密激光干涉测量的研究现状及其关键技术[J].航空精密制造技术,1998(6). |
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| 作者姓名： | 李东光 张国雄 |
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| 作者单位： | 天津大学精密仪器及光电子工程学院 |
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| 摘 要： | 总结了高速精密激光干涉测量的研究现状；分析了影响测量精度和提高测量速度的主要因素及解决问题的关键技术，包括激光稳频技术和光学反馈、精度与测速的制约关系、空气折射率的影响及补偿、电子细分技术、光学非线性误差等
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| 关 键 词： | 激光干涉 稳频 折射率 细分 光学混叠 |
The Present State of High speed and High accuracy Laser Interference and Its Key Techniques |
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| Li dongguang,Zhang Guoxiong.The Present State of High speed and High accuracy Laser Interference and Its Key Techniques[J].Aviation Precision Manufacturing Technology,1998(6). |
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| Authors: | Li dongguang Zhang Guoxiong |
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| Abstract: | This paper summarizes the present state of high-speed and high-accuracy laser interference. Then it analyses the main factors affecting measuring accuracy and key techniques that can improve measuring speed including laser frequency stabilizationt echnology, optical feedback, the restrict relationship between measuring accuracy and measuring speed, the influence and compensation of air refractivity, optical nonlinear error, etc. |
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| Keywords: | laser interference frequency stabilization refractivity subdivision optical aliasing |
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