Casimir力对微加速度计性能的影响分析

随着微器件的尺寸日益缩小，有必要评估Casimir力对微器件性能的影响。本文以微机电系统中常见的微加速度计为对象，建模分析了Casimir力对其性能的影响。研究表明，Casimir力对微加速度计性能的影响随极板间距离的减小而迅速增大。Casimir力使得微加速度计的最大可检测加速度减小，并且随支撑粱刚度的减小，对灵敏度的影响逐渐增大。当检测电容极板间距离等于400nm时，Casimir力引起微加速度计的最大可检加速度的降幅迭5．89％。

Influence of Casimir Force on Performance of Microaccelerometer

The Casimir force is the attraction between metallic surfaces as a result of quantum mechanical vacuum fluctuations of the electromagnetic field. The maximum detectable acceleration and the sensitivity of beam-supported microaccelerometers are analyzed with and without the consideration of the Casimir force. It is shown that the Casimir force plays an important role on the performance of microaccelerometers when small separation between the substrate and the surface of the inertial mass is available. Compared with conditions Casimir force is ignored, the Casimir force causes maximum detectable acceleration smaller. The influence of the Casimir force on the sensitivity of microaccelerometers increases with the decrease of the stiffness of supporting beams. When the distance between the surface of the inertial mass and the capacitance sensing plate is equal to 400 nm, the Casimir force can lead to a decrease of 5.89% at the maximum detectable acceleration of the microaccelerometer.