多环谐振微陀螺性能参数的有限元计算

多环谐振陀螺是目前最具发展前景的MEMS陀螺之一，如何快速对多环谐振陀螺进行参数优化设计已成为研究热点。从多环谐振陀螺的基本结构出发，通过理论研究，发现影响机械灵敏度和机械热噪声的主要结构参数为陀螺的谐振频率、有效质量、角度增益以及品质因子。使用COMSOL和MATLAB等软件搭建了有限元计算平台，实现了对上述性能参数的有限元仿真求解，为研究环形谐振陀螺结构的性能参数和优化设计提供了有力的软件仿真工具，并且可以推广应用到其他陀螺器件的研究中。

Finite Element Method for Performance Parameters of Disk Resonator Gyroscope

Disk resonator gyroscope (DRG) is one of the most promising MEMS gyroscopes. How to quickly optimize the parameters of DRG has become a research hotspot. In this paper, based on the basic structure of the DRG and theoretical research, it is found that the main structural influence parameters of mechanical sensitivity and mechanical thermal noise are the resonant frequency, effective mass, angular gain and quality factor of the gyroscope. The finite element calculation platform is built by using COMSOL and MATLAB software to realize the finite element simulation of the above performance parameters, which provides a powerful software simulation tool for the research of performance parameters and optimization design of DRG and the simulation methods can be widely used on other gyroscope devices.