| 静电悬浮微加速度计气膜阻尼分析 |
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| 引用本文： | 张龙,何志坚,邓忠武,马高印.静电悬浮微加速度计气膜阻尼分析[J].导航与控制,2012(3):52-55. |
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| 作者姓名： | 张龙 何志坚 邓忠武 马高印 |
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| 作者单位： | 北京航天控制仪器研究所;北京航天控制仪器研究所;北京航天控制仪器研究所;北京航天控制仪器研究所 |
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| 摘 要： | 气膜阻尼对静电悬浮微加速度计系统的动态特性有着重要的影响。本文首先根据流体力学理论，构建了描述微加速度计内部气体压膜阻尼特性的线性Reynolds方程和描述微加速度计内部气体滑膜阻尼特性的线性Navier-Stokes方程，推导出悬浮质量块在轴向和径向运动时的气膜阻尼系数，并进行比较。然后采用ANSYS软件进行仿真分析，结果表明，解析误差在10%以内。
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| 关 键 词： | 静电悬浮 微加速度计 气膜阻尼 |
Analysis of Gas Fihn Damping in Electrostatically Suspended Micromechanical Accelerometer |
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| ZHANG Long,HE Zhi-jian,DENG Zhong-wu and MA Gao-yin.Analysis of Gas Fihn Damping in Electrostatically Suspended Micromechanical Accelerometer[J].Navigation and Control,2012(3):52-55. |
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| Authors: | ZHANG Long HE Zhi-jian DENG Zhong-wu and MA Gao-yin |
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| Institution: | Beijing Institute of Aerospace Control Device;Beijing Institute of Aerospace Control Device;Beijing Institute of Aerospace Control Device;Beijing Institute of Aerospace Control Device |
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| Abstract: | Gas film damping plays a critical role in the operation of electrostatically suspended micromechanical accelerometer, and can provide margin compensation to an inherently unstable system. In this paper, a linearized Reynolds equation is used to acquire the squeeze film damping while a Navier-Stokes equation is employed to obtain the slide film damping. The analytical results are well verified by ANSYS simulation results with less than 10% deviation. |
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