带旋转的三面互检法

按传统三面互检法评价平面度偏差,结果只能由评价平晶在两条相互垂直的直径线上的测量数值得到,其评价方法与平晶的真实面形偏差存在差异.本文介绍的基于光电探测技术、激光干涉技术、图像处理技术的带旋转三面互检法可以解出平面上N条直径线上的点的面形偏差,可以提高测量准确度.

Rotating Mutual Calibrating Method of Tree Optic Flats

Follow the traditional evaluation method for the absolute testing of three optic flats, the result of the deviation can be evaluated by the deviation on two perpendicular diameters, its evaluation method is different from the true surface graph exactly. This text introduces a rotation method for the absolute testing of three optic flats, which is based on the photoelectric detecting technique, laser interference technique and image manipulation technique, it can solve the deviation on N diameters of each optic flat and enhance the accuracy.