硅谐振式微传感器开环特性测试与数据处理

为了精确讣算出硅谐振式微传感器的谐振频率、谐振峰值和品质因数，根据硅谐振式微传感器的理论模型以及开环特性测试实测数据，通过分析讨论、仿真与实验从多方面比较了低通滤波与改进的最小二乘法等数据处理算法，并得到了整体最优的算法。所设计的相应程序为辟谐振武微传感器开环特性测试系统专用数据处理程序，同时本文讨论的算法也适用于其他类似的数据处理。

Data Processing and Testing of the Open-Loop Characteristics for the Silicon Resonant Microsensor

For the sake of calculating the resonant frequency, resonant amplitude and quality factor of silicon resonant microsensor accurately, several data processing algorithms such as lowpass and reformative method of least squares are analyzed and compared by emulation and experiments, based on the theoretical model of silicon resonant microsensor and the actual data acquired by the Open-loop characteristics test, and the holistic best algorithm is found. The program designed is the special data processing program of the Open-loop characteristics test system developed by, but the algorithms discussed in this paper can also be applied to similar data processing and have extensive referrible value.