| 激光外差干涉信号处理技术的研究 |
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| 引用本文： | 谢广平,方萃长.激光外差干涉信号处理技术的研究[J].宇航计测技术,1998,18(4):7-12. |
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| 作者姓名： | 谢广平 方萃长 |
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| 作者单位： | 中国矿业大学北京研究生部 |
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| 基金项目： | 博士后基金,清华大学精密计量与测试国家重点实验室开放基金,教委博士点基金 |
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| 摘 要： | 介绍了两种激光外差干涉信号的处理方法锁相频率解调法及组合频率解调法。此方法适用于需要实时反馈控制以及定位曝光等场合。用此方法，可以使干涉仪的测量分辨力分别达到３ｎｍ和０．５ｎｍ，干涉仪测量棱镜的允许运动速度达到３ｍｍ／ｓ。
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| 关 键 词： | 激光 外差干涉信号 频率 解调技术 |
Study on signal procession technology for laser heterodyne interferometry |
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| Xie Guangping\ \ Fang Cuichang\ \,Dai Gaoliang\ \ Yin Chunyong.Study on signal procession technology for laser heterodyne interferometry[J].Journal of Astronautic Metrology and Measurement,1998,18(4):7-12. |
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| Authors: | Xie Guangping\ \ Fang Cuichang\ \ Dai Gaoliang\ \ Yin Chunyong |
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| Institution: | Xie Guangping\ \ Fang Cuichang\ \ Dai Gaoliang\ \ Yin Chunyong |
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| Abstract: | Two kinds of signal processing methods for heterodyne interferometer, phase locked frequency demodulation and combinatorial frequency demodulation are presented in this paper. These methods are useful for real time feed back control and position exposures. Using these methods to process heterodyne signal not only make the measuring resolution up to 3nm and 0.5nm, but also enable the measuring retroreflector of interferometer to move at a velocity of 3 mm/s. \ \ |
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| Keywords: | Laser\ Heterodyne interference signal\ Frequency\ Demodulation technigue |
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