| 定容式气体微流量校准装置吸放气特性研究 |
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| 引用本文： | 郭美如,张涤新,赵澜,赵定众. 定容式气体微流量校准装置吸放气特性研究[J]. 宇航计测技术, 2005, 25(2): 31-34,37 |
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| 作者姓名： | 郭美如 张涤新 赵澜 赵定众 |
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| 作者单位： | 兰州物理研究所,兰州,730000 |
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| 摘 要： | 介绍了定容式气体微流量校准装置的组成和工作原理,对流量计吸放气特性进行了实验研究,给出了静态压力上升速率曲线,并对实验结果进行了理论分析,得出了对于结构复杂的真空系统要结合系统各组件的结构、历史使用情况等因素来分析系统的吸放气特性,在一定的温度下长时间全面烘烤是降低真空系统放气率的有效途径。
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| 关 键 词： | 定容式流量计 校准装置 吸放气特性 |
| 文章编号： | 1000-7202(2005)01-0031-04 |
| 修稿时间： | 2004-10-12 |
Research on Gas Absorption and Outgassing Characteristics of Constant Volume Micro-flow Calibrating Equipment |
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| GUO Mei-ru,ZHANG Di-xin,ZHAO Lan,ZHAO Ding-zhong. Research on Gas Absorption and Outgassing Characteristics of Constant Volume Micro-flow Calibrating Equipment[J]. Journal of Astronautic Metrology and Measurement, 2005, 25(2): 31-34,37 |
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| Authors: | GUO Mei-ru ZHANG Di-xin ZHAO Lan ZHAO Ding-zhong |
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| Abstract: | Introduces the composition and work principle of constant volume Micro-flow calibrating equipment. Makes research on the characteristics of flowmeter's gas absorption and outgassing. Gives the rating increased curve of the static pressure and analyses the test results. The conclusion is that for the gas absorption and outgassing characteristics of complicated high vacuum system should be thought the structure of system's components, the situation used before and etc. Baking the whole system is a efficient way to decrease the outgassing rate of the vacuum system under a certain temperature. |
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| Keywords: | Constant volume flowmeter Calibrating equipment Gas absorption and outgassing characteristics |
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