面向硅压阻式压力传感器温度补偿的组合方法

提出一种面向硅压阻式压力传感器温度补偿的组合方法,采用拟合法建立不同温度下压力传感器变换函数,采用基于变换函数系数的线性插值法获得温度补偿后传感器变换函数,设计了压力传感器信号处理模块,开展了基于组合补偿方法的压力信号补偿过程仿真,结果表明经温度补偿后,压力测量精度在0.1%以内，温度补偿过程耗时约10 μs，补偿算法占用片上资源少,能够满足压气机出口压力测量要求。 

A combined temperature-compensation approach to silicon piezoresistance pressure sensor

A combined temperature-compensation approach to silicon piezoresistance pressure sensors was proposed. The fitting method was adopted to identify the transformation function of pressure sensors at different temperatures. The linear interpolation was employed to achieve the temperature-compensated coefficients of transformation functions. The pressure sensor signal processing module was designed. The simulations on the pressure signal processing with combined temperature-compensation were conducted. The simulation results showed that the pressure measurement accuracy was less than 0.1%, the temperature measurement time was around 10 μs, and the few on-chip resources were consumed. The temperature-compensation approach could meet the measurement requirements of compressor outlet pressure.