基于Ag/CNTs-PDMS的高灵敏度柔性压力传感器研制及性能测试

智能传感的应用对柔性压力传感器的需求量和性能提出了更高的要求，因此，需要开发一种简单、廉价、可批量化的方法实现大范围、高灵敏压力传感器的制造。文章基于压阻效应，采用浸渍−干燥法制备了一种基于镀银碳纳米管−聚二甲基硅氧烷（Ag/CNTs-PDMS）复合结构的柔性压力传感器。研究表明，所制备的压力传感器具有较高的灵敏度（0.718 kPa-1）、较宽的工作范围（40 kPa）、较短的响应时间（1.14 s）以及良好的可重复性，有望用于在轨实时压力监测。

Development and performance test of highly sensitive flexible pressure sensor based on Ag/CNTs-PDMS materials

The realization of intelligent sensing involves high requirements on the number and the performance of flexible pressure sensors, Therefore, it is nessary to develop a simple, inexpensive, and scalable method for manufacturing the sensors with high sensitivity and relatively large scope. A flexible piezoresistive pressure sensor is developed based on the silver/carbon nanotubes-polydimethylsiloxane (Ag/CNTs-PDMS) composite prepared by the cube sugar template method and with the dip-drying process. The test result indicates that the thus developed sensor has a most high sensitivity of 0.718 kPa-1, a wide working range (up to 40 kPa), a short response time of 1.14 s, as well as a good repeatability. Owing to its good sensing properties, this sensor has a potential application in the detection of pressure in real-time.