一体式石英振梁加速度计工程化研究进展

一体式石英振梁加速度计是一种高精度谐振式MEMS惯性传感器。针对现有石英振梁加速度计存在的体积大、全温及力学环境适应性不足等问题,提出一种基于三层石英结构的一体式石英振梁加速度计的设计方案。通过突破高精度薄梁腐蚀及晶圆级键合两项关键技术,成功研制出加速度计样机。经测试,产品全温稳定性优于0.5mg,振动整流误差优于200μg/g^2(@15.68g rms),可以满足中高精度惯性导航应用需求。后续期望通过原位温度补偿及直接键合等技术进一步提升一体式石英振梁加速度计的全温精度及长期稳定性。

Engineering progress of monolithic quartz vibrating beam accelerometer

Monolithic quartz vibrating beam accelerometer is a kind of high-accuracy resonant MEMS inertial sensor. A new structure of monolithic quartz vibrating beam accelerometer based on triple quartz layers is presented to solve the problems such as large size and bad performances during the tests of full-temperature and mechanical environment. The accelerometer prototype is obtained with high-precision thin cantilever etching and wafer bonding. The test results of full-temperature stability and vibration rectification error of the prototype are better than 0.5 mg and 200μg/g^2(@15.68 g rms)respectively, which can meet the needs of medium and high precision inertial navigation. The full-temperature accuracy and long-term stability of monolithic quartz vibrating beam accelerometer are expected to improve through some important techniques such as in-situ temperature compensation and direct bonding.