离子镀TiN膜层扩散壁障作用的试验研究

利用离子镀方法在基体与耐热涂层之间予先沉积一层ＴｉＮ膜层，作为扩散壁障（中间阻挡层），进行了高温阻扩散试验研究，并应用光镜、电镜、Ｘ射线衍射仪及电子探针等手段对试样氧化区域进行了分析。结果表明，有ＴｉＮ中间层试样、其高温抗氧化性明显提高，ＴｉＮ层在一定温度范围内有良好的稳定性和阻扩散作用；在本试验范围内，ＴｉＮ中间层厚度增加阻扩散效果增强。

Research on the Experiment of the Diffusion Barrier of TiN Film Ion-Plating

The experiment of a TiN film ion-plating as a ddiffusion barrier(middle barrier layer)between the substrate and the heat resistant coating and its diffusion resistant at high temperature is studied. The oxidation range is examined by optical microscope, SEM, X-ray microdiffraction and electron probe. The results show that the oxidation resistence of a specimen with TiN middle layer increases sreatly, and that the TiN layer has excellent stability and diffusion resistance at certain temperature range. In addition, the results reveal that the thickness of the TiN middle layer increases and the effect of the diffusion barrier strensthens.