| 一种激光长刻机的工作原理 |
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| 引用本文： | 仝艳新.一种激光长刻机的工作原理[J].航空精密制造技术,2009,45(1). |
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| 作者姓名： | 仝艳新 |
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| 作者单位： | 北京航空精密机械研究所,北京,100076 |
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| 摘 要： | 介绍了一种静态激光长刻机的工作原理,并介绍了该光刻方法的关键技术和工艺.
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| 关 键 词： | 光刻法 激光长刻机 重复曝光 |
Working Principle of Static Laser Long Lithographic Machine |
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| TONG Yan-xin.Working Principle of Static Laser Long Lithographic Machine[J].Aviation Precision Manufacturing Technology,2009,45(1). |
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| Authors: | TONG Yan-xin |
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| Institution: | Beijing Precision Engineering Institute for Aircraft Industry;Beijing 100076 |
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| Abstract: | The working principle of a static laser long lithographic machine was introduced. The key technology and main processes for this lithographic method were described. |
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| Keywords: | lithography laser long lithographic machine repeating exposure |
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