环形科氏力振动陀螺发展情况概述

MEMS科氏力振动陀螺具有体积小、质量小、功耗低的优势，在高精度姿态控制、短时智能设备导航等领域具有广泛的应用前景。其中，零偏不稳定性优于0.1(°)/h的高性能MEMS陀螺是该领域的重要研究方向。目前，以环形拓扑结构为代表的科氏力振动陀螺成为该领域的主流技术方案之一。回顾了环形科氏力振动陀螺的发展历程，综述了近几年国内外研究机构围绕该类型陀螺开展的研究热点，总结了该类型陀螺的性能优势与面临的挑战，整理了该类型陀螺潜在的发展方向，为国内外同行开展该类型陀螺结构科学研究，提高MEMS科氏力振动陀螺性能提供了参考和借鉴。

Development of Ring Coriolis Force Vibrating Gyroscope

MEMS Coriolis force vibratory gyroscope has the advantages of small volume, low power consumption and light weight, which has a wide application prospect in the fields of high-precision attitude control, short-term intelligent device navigation and so on. Among them, the high performance MEMS gyroscope with zero bias instability better than 0.1 °/h is an important research direction in this field. This paper reviews the development history of ring Coriolis force vibratory gyroscope, introduces the research hotspots around this type of gyroscope carried out by domestic and foreign research institutions in recent years, summarizes the performance advantages and challenges of this type of gyroscope, and sorts out the potential development direction of this type of gyroscope. It provides a reference for the domestic and foreign counterparts to carry out the structure scientific research of this type of gyroscope and improve the performance of MEMS Coriolis force vibrating gyroscope.