稀土钇提高离子镀TiN膜层与基体结合力的研究

研究了稀土钇不同含量时对离子镀ＴｉＮ膜层与基体结合力的影响．用扫描电镜，俄歇谱仪，Ｘ射线衍射等手段，对加入稀土钇的ＴｉＮ膜层作了分析。结果表明，加适量稀土钇后，ＴｉＮ膜层与基体的结合力大大提高。其微观机制是，加稀土钇后，膜层相组成发生变化，在膜－基之间形成一过渡层，塑性相（Ｔｉ相）增加，脆性相（Ｔｉ２Ｎ）减少，从而减小了膜－基界面间的应力。此外，结果还表明，稀土钇能明显提高镀膜过程中钛料蒸发率，使成膜速率增加，在相同镀膜时间内ＴｉＮ膜层加厚。

Research on Bond Strength between Ion Plated TiN Coating and Substrate Improved by Rare Earth Y

Deals with the effect of rare earth Y of different contents on the bond strength between the ion plated TiN coating and the substrate.Ti (Y)N coating is examined by means of SEM,Auger energy and X-ray microdiffraction.The results show that the bond strength between the TiN coating and the substrate increases greatly by adding moderate amount of rare earth Y. The micro--mechanism is that adding rare earth Y brings about change in the composition of the coating phase and a transition layer is formed between the coating--substrate,which increases the ductility phase(Ti phase)and decreases the fragility phase (Ti2N), thus decreasing the bond strength between the coating--substrate. In addition,the rare earth Y can obviously increases the evaporating rate of titanium during the process of ion plated coating and increases the rate of forming the coating. The ion plated coating remains the same.