Micromechanical gyroscope finite-element analysis

Mechanical analysis by method of finite-element analysis of the construction of two-component micromechanical gyroscope is explored. 3D geometric model and finite-element model of the gyroscope are made. Natural frequencies and mode shapes of the gyroscope are determined. Parameters ensuring resonance tuning are realized. The choice of the most appropriate variant of construction takes place by realizing of modal analysis and varing of sensor's geometry. Deformations of device construction elements determined at maximum of the measured velocity.