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| 浸渍-提拉法制备WO3薄膜的气敏性能研究 | |
| 引用本文： | 杨俊梅,桑海军,毕淑娟.浸渍-提拉法制备WO3薄膜的气敏性能研究[J].沈阳航空工业学院学报,2007,24(2):68-70. |
| 作者姓名： | 杨俊梅 桑海军 毕淑娟 |
| 作者单位： | 1. 沈阳航空工业学院,辽宁,沈阳,110034 2. 辽宁省交通高等专科学校,辽宁,沈阳,110122 3. 中国科学院金属研究所,辽宁,沈阳,110016 |
| 摘 要： | 采用溶胶-凝胶方法制备WO3前驱液,利用浸渍-提拉法使其成膜。通过XRD分析了不同热处理温度对WO3晶体结构的影响,通过SEM图观察了不同提拉次数的WO3薄膜形貌。所得WO3薄膜的微观结构和气敏性能随提拉次数不同而有很大差异,提拉1次、2次的样品薄膜不连续,电阻过大,灵敏度无法测量;提拉3次成膜的样品电阻稳定,气敏性能最好,对NO2有很高的灵敏度。 |
| 关 键 词： | WO3薄膜 浸渍-提拉法 气敏性能 |
| 文章编号： | 1007-1385（2007）02-0068-03 |
| 收稿时间： | 2006-11-06 |
| 修稿时间： | 2006-11-06 |
A study on gas sensitivity of WO3 films prepared by dip-coating method |
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| YANG Jun-mei,SANG Hai-jun,BI Shu-juan.A study on gas sensitivity of WO3 films prepared by dip-coating method[J].Journal of Shenyang Institute of Aeronautical Engineering,2007,24(2):68-70. | |
| Authors: | YANG Jun-mei SANG Hai-jun BI Shu-juan |
| Institution: | 1. Shenyang institute of Aeronautical Engineering, Liaoning Shenyang 110136; 2. Liaoning Provincial Communication College , Liaoning Shenyang 110136;3. Institute of Metal Research, Chinese Academy of Science, Liaoning Shenyang 110016 |
| Abstract: | WO3 precursor solution was prepared by Sol-gel method.The films were printed by dip-coating method.The microstructure of the WO3 films which were annealed at different temperature was investigated by XRD.The WO3 film shape was observed by SEM.There were various differences in microstructure and gas sensing of the WO3 films of different dip-coating times.Once or twice dip-coating film were discontinuous,the resistance was large and the sensitivity couldn't be measured.The resistance of the film dip-coating 3 times was stable.The film has high sensitivity to NO2. |
| Keywords: | WO3 films dip-coating method gas sensitivity |
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